A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy

Alipour, Afshin; Coskun, M. Bulut; Moheimani, S. O.  Reza

doi:10.1063/1.5109900

Title: A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy

Journal Article · Wed Jul 31 00:00:00 EDT 2019 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.5109900· OSTI ID:1548310

^[1];

^[1]

Univ. of Texas-Dallas, Richardson, TX (United States)

Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Univ. of Texas at Dallas, Richardson, TX (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office

Grant/Contract Number:: EE0008322

OSTI ID:: 1548310

Alternate ID(s):: OSTI ID: 1545907

Journal Information:: Review of Scientific Instruments, Vol. 90, Issue 7; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 7 works

Citation information provided by
Web of Science

References (36)

Scanning tunneling microscopy Binnig, G.; Rohrer, H. Surface Science, Vol. 126, Issue 1-3 https://doi.org/10.1016/0039-6028(83)90716-1	journal	March 1983
Atomic precision lithography on Si Randall, J. N.; Lyding, J. W.; Schmucker, S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237096	journal	January 2009
Tip-Sample Interactions in the Scanning Tunneling Microscope for Atomic-Scale Structure Fabrication Aono, Masakazu; Kobayashi, Ataru; Grey, Fran\ccois Japanese Journal of Applied Physics, Vol. 32, Issue Part 1, No. 3B https://doi.org/10.1143/jjap.32.1470	journal	March 1993
A self-tuning controller for high-performance scanning tunneling microscopy Tajaddodianfar, Farid; Moheimani, S. O. Reza; Owen, James 2017 IEEE Conference on Control Technology and Applications (CCTA) https://doi.org/10.1109/CCTA.2017.8062448	conference	August 2017
Rigid design of fast scanning probe microscopes using finite element analysis Kindt, Johannes H.; Fantner, Georg E.; Cutroni, Jackie A. Ultramicroscopy, Vol. 100, Issue 3-4 https://doi.org/10.1016/j.ultramic.2003.11.009	journal	August 2004
A high-speed atomic force microscope for studying biological macromolecules Ando, T.; Kodera, N.; Takai, E. Proceedings of the National Academy of Sciences, Vol. 98, Issue 22 https://doi.org/10.1073/pnas.211400898	journal	October 2001
High-speed Atomic Force Microscopy for Capturing Dynamic Behavior of Protein Molecules at Work Ando, Toshio; Kodera, Noriyuki; Uchihashi, Takayuki e-Journal of Surface Science and Nanotechnology, Vol. 3 https://doi.org/10.1380/ejssnt.2005.384	journal	January 2005
A serial-kinematic nanopositioner for high-speed atomic force microscopy Wadikhaye, Sachin P.; Yong, Yuen Kuan; Reza Moheimani, S. O. Review of Scientific Instruments, Vol. 85, Issue 10 https://doi.org/10.1063/1.4897483	journal	October 2014
Design and Modeling of a High-Speed AFM-Scanner Schitter, Georg; Astrom, Karl J.; DeMartini, Barry E. IEEE Transactions on Control Systems Technology, Vol. 15, Issue 5 https://doi.org/10.1109/tcst.2007.902953	journal	September 2007
Design of an Inertially Counterbalanced $Z$ -Nanopositioner for High-Speed Atomic Force Microscopy Yong, Y. K.; Mohemani, S. O. R. IEEE Transactions on Nanotechnology, Vol. 12, Issue 2 https://doi.org/10.1109/tnano.2012.2233749	journal	March 2013
High-speed AFM and nano-visualization of biomolecular processes Ando, Toshio; Uchihashi, Takayuki; Kodera, Noriyuki Pflügers Archiv - European Journal of Physiology, Vol. 456, Issue 1 https://doi.org/10.1007/s00424-007-0406-0	journal	December 2007
Scanning probe microscopes go video rate and beyond Rost, M. J.; Crama, L.; Schakel, P. Review of Scientific Instruments, Vol. 76, Issue 5 https://doi.org/10.1063/1.1915288	journal	May 2005
A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control Maroufi, Mohammad; Bazaei, Ali; Reza Moheimani, S. O. IEEE Transactions on Control Systems Technology, Vol. 23, Issue 2 https://doi.org/10.1109/tcst.2014.2345098	journal	March 2015
High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy Maroufi, Mohammad; Fowler, Anthony G.; Bazaei, Ali Review of Scientific Instruments, Vol. 86, Issue 2 https://doi.org/10.1063/1.4907908	journal	February 2015
A 2DOF SOI-MEMS Nanopositioner With Tilted Flexure Bulk Piezoresistive Displacement Sensors Maroufi, Mohammad; Moheimani, S. O. Reza IEEE Sensors Journal, Vol. 16, Issue 7 https://doi.org/10.1109/jsen.2015.2504846	journal	April 2016
Zero displacement microelectromechanical force sensor using feedback control Bulut Coskun, M.; Moore, Steven; Moheimani, S. O. Reza Applied Physics Letters, Vol. 104, Issue 15 https://doi.org/10.1063/1.4871380	journal	April 2014
Integrated micro‐scanning tunneling microscope Xu, Y.; MacDonald, N. C.; Miller, S. A. Applied Physics Letters, Vol. 67, Issue 16 https://doi.org/10.1063/1.115134	journal	October 1995
Microfabricated scanning tunneling microscope Akamine, S.; Albrecht, T. R.; Zdeblick, M. J. IEEE Electron Device Letters, Vol. 10, Issue 11 https://doi.org/10.1109/55.43113	journal	November 1989
Bulk micromachined tunneling tips integrated with positioning actuators Mita, M.; Kawara, H.; Toshiyoshi, H. Journal of Microelectromechanical Systems, Vol. 14, Issue 1 https://doi.org/10.1109/jmems.2004.838997	journal	February 2005
MEMS-based high speed scanning probe microscopy Disseldorp, E. C. M.; Tabak, F. C.; Katan, A. J. Review of Scientific Instruments, Vol. 81, Issue 4 https://doi.org/10.1063/1.3361215	journal	April 2010
Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging Zhang, Y.; Wang, J.; Santhanam, S. TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference https://doi.org/10.1109/TRANSDUCERS.2011.5969662	conference	June 2011
Scanning probe microscopy at video-rate Schitter, Georg; Rost, Marcel J. Materials Today, Vol. 11 https://doi.org/10.1016/s1369-7021(09)70006-9	journal	January 2008
Variable‐temperature scanning tunneling microscope Lyding, J. W.; Skala, S.; Hubacek, J. S. Review of Scientific Instruments, Vol. 59, Issue 9 https://doi.org/10.1063/1.1140047	journal	September 1988
Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds Geerlings, J.; Sarajlic, E.; Berenschot, J. W. Journal of Micromechanics and Microengineering, Vol. 24, Issue 10 https://doi.org/10.1088/0960-1317/24/10/105013	journal	September 2014
Nanotubes as nanoprobes in scanning probe microscopy Dai, Hongjie; Hafner, Jason H.; Rinzler, Andrew G. Nature, Vol. 384, Issue 6605 https://doi.org/10.1038/384147a0	journal	November 1996
Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing Ruppert, Michael G.; Moore, Steven I.; Zawierta, Michal Nanotechnology, Vol. 30, Issue 8 https://doi.org/10.1088/1361-6528/aae40b	journal	January 2019
On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach Ruppert, Michael G.; Fowler, Anthony G.; Maroufi, Mohammad Journal of Microelectromechanical Systems, Vol. 26, Issue 1 https://doi.org/10.1109/jmems.2016.2628890	journal	February 2017
On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers With Integrated Piezoelectric Transducers Coskun, M. Bulut; Fowler, Anthony G.; Maroufi, Mohammad Journal of Microelectromechanical Systems, Vol. 26, Issue 6 https://doi.org/10.1109/jmems.2017.2731762	journal	December 2017
$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration Coskun, M. Bulut; Alemansour, Hamed; Fowler, Anthony G. IEEE Transactions on Control Systems Technology, Vol. 27, Issue 5 https://doi.org/10.1109/tcst.2018.2850338	journal	September 2019
Feedback-Controlled MEMS Force Sensor for Characterization of Microcantilevers Moore, Steven Ian; Coskun, M. Bulut; Alan, Tuncay Journal of Microelectromechanical Systems, Vol. 24, Issue 4 https://doi.org/10.1109/jmems.2014.2382648	journal	August 2015
Integrated tunneling sensor for nanoelectromechanical systems Sadewasser, S.; Abadal, G.; Barniol, N. Applied Physics Letters, Vol. 89, Issue 17 https://doi.org/10.1063/1.2362593	journal	October 2006
A method for in situ characterization of tip shape in ac-mode atomic force microscopy using electrostatic interaction Olsson, L.; Lin, N.; Yakimov, V. Journal of Applied Physics, Vol. 84, Issue 8 https://doi.org/10.1063/1.368618	journal	October 1998
Observation of Liquid Neck Formation with Scanning Force Microscopy Techniques Colchero, J.; Storch, A.; Luna, M. Langmuir, Vol. 14, Issue 9 https://doi.org/10.1021/la971150z	journal	April 1998
Capillary forces in tapping mode atomic force microscopy Zitzler, L.; Herminghaus, S.; Mugele, F. Physical Review B, Vol. 66, Issue 15 https://doi.org/10.1103/physrevb.66.155436	journal	October 2002
Scanning tunneling microscopy Binnig, G.; Rohrer, H. Surface Science Letters, Vol. 152-153 https://doi.org/10.1016/0167-2584(85)90065-9	journal	April 1985
Scanning tunneling microscopy Binnig, G.; Rohrer, H. IBM Journal of Research and Development, Vol. 44, Issue 1.2 https://doi.org/10.1147/rd.441.0279	journal	January 2000