Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

Barauskas, Dovydas; Pelenis, Donatas; Vanagas, Gailius; Viržonis, Darius; Baltrušaitis, Jonas

doi:10.3390/s19143236

Title: Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

Journal Article · Tue Jul 23 00:00:00 EDT 2019 · Sensors

DOI:https://doi.org/10.3390/s19143236· OSTI ID:1544579

; Pelenis, Donatas; Vanagas, Gailius;

; Baltrušaitis, Jonas

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO₂) and sulfur dioxide (SO₂) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO₂ gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO₂ concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO₂ and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO₂ showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO₂, SO₂, in dry N₂.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Center for Understanding and Control of Acid Gas-induced Evolution of Materials for Energy (UNCAGE-ME); Georgia Institute of Technology, Atlanta, GA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: SC0012577

OSTI ID:: 1544579

Alternate ID(s):: OSTI ID: 1611882

Journal Information:: Sensors, Journal Name: Sensors Vol. 19 Journal Issue: 14; ISSN 1424-8220

Publisher:: MDPI AGCopyright Statement

Country of Publication:: Switzerland

Language:: English

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Cited by: 13 works

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37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
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Engineering
Instruments & Instrumentation
CMUT
methylated polyethyleneimine
CO2
SO2
gravimetric detection
gas sensing

Title: Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

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