Sputtering in a high-flux plasma environment
Journal Article
·
· Scripta Materialia
Not provided.
- Research Organization:
- Univ. of California, San Diego, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- FG02-07ER54912
- OSTI ID:
- 1538791
- Journal Information:
- Scripta Materialia, Vol. 143, Issue C; ISSN 1359-6462
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
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