Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy
Journal Article
·
· Journal of the American Chemical Society
Not provided.
- Research Organization:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- FG02-03ER15457
- OSTI ID:
- 1534997
- Journal Information:
- Journal of the American Chemical Society, Vol. 139, Issue 6; ISSN 0002-7863
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
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