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Title: ZnO functionalization of multiwalled carbon nanotubes for methane sensing at single parts per million concentration levels

Journal Article · · Journal of Vacuum Science and Technology B
DOI:https://doi.org/10.1116/1.4931694· OSTI ID:1532168
 [1];  [2];  [2];  [3];  [2];  [4];  [5];  [1]
  1. Univ. of Illinois at Chicago, Chicago, IL (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
  3. Illinois Mathematics and Science Academy, Aurora, IL (United States)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  5. U.S. Environmental Protection Agency, Las Vegas, NV (United States)

This paper presents a novel atomic layer deposition (ALD) based ZnO functionalization of surface pretreated multiwalled carbon nanotubes (MWCNTs) for highly sensitive methane chemoresistive sensors. The temperature optimization of the ALD process leads to enhanced ZnO nanoparticle functionalization and improvement in their crystalline quality as shown by energy dispersive x-ray and Raman spectroscopy. The behavior of ZnO-MWCNT sensors in presence of methane concentrations down to 2 ppm level has been compared with that of pristine MWCNTs demonstrating that ZnO functionalization is an essential factor behind the highly sensitive chemoresistive nature of the ZnO-MWCNT heterostructures. As a result, the sensor is currently being tested under a range of conditions that include potentially interfering gases and changes to relative humidity.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1532168
Journal Information:
Journal of Vacuum Science and Technology B, Vol. 33, Issue 6; ISSN 2166-2746
Publisher:
American Vacuum Society / AIPCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 16 works
Citation information provided by
Web of Science

References (21)

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