Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-06CH11357; W-31-109-ENG-38
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Number(s):
- 7,994,688
- Application Number:
- 12/233,228
- OSTI ID:
- 1531691
- Resource Relation:
- Patent File Date: 2008-09-18
- Country of Publication:
- United States
- Language:
- English
Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages
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patent | February 2015 |
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