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Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution

Patent ·
OSTI ID:1531691
An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.
Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357; W-31109-ENG-38
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
7,994,688
Application Number:
12/233,228
OSTI ID:
1531691
Country of Publication:
United States
Language:
English