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Title: Surface modification of silicon nitride for thick film silver metallization of solar cell

Patent ·
OSTI ID:1531484

In the manufacture of a wafer-type silicon solar cell having on its front side a silicon nitride AR coating and an electrical contact that is formed by printing a thick film metal ink onto the silicon nitride in the form of a grid-like pattern having narrow fingers and then firing that ink to convert it to a bonded metal contact, a surface treatment method is provided to adjust the condition of the surface of the silicon nitride coating in a manner that substantially improves the adherence of the thick film ink to the silicon nitride coating, thereby eliminating or substantially inhibiting the tendency of the narrow fingers of the unfired ink to peel away before the ink has been fired to produce the electrical contact. The surface treatment method comprises subjecting the silicon nitride layer to a corona discharge using a plasma jet and is readily incorporated into the manufacturing process sequence without requiring any modification of existing stages of that sequence.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-83CH10093; ZAF-6-14271-10
Assignee:
RWE Schott Solar, Inc. (Billerica, MA)
Patent Number(s):
6,815,246
Application Number:
10/365,774
OSTI ID:
1531484
Resource Relation:
Patent File Date: 2003-02-13
Country of Publication:
United States
Language:
English

References (8)

Apparatus for washing semiconductor materials patent March 1993
Self-cleaning ionizing air gun patent February 1995
Corona discharge surface treating method patent November 1995
Corona discharge device for destruction of airborne microbes and chemical toxins patent March 2000
Method and device for ion generation patent April 2002
Multi-mode treater with internal air cooling system patent August 2002
System for precision control of the position of an atmospheric plasma patent December 2002
Photoelectric conversion device and method of making the same patent December 2003

Cited By (10)

Silicon based ion emitter assembly patent November 2018
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom patent January 2019
Method for producing electric contacts on a semiconductor component patent September 2012
Apparatus for field welding solar receiver tubes patent September 2014
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom patent March 2015
Method for joining solar receiver tubes patent September 2015
Solar cell and method of manufacturing the same patent April 2016
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom patent March 2017
Silicon based ion emitter assembly patent May 2017
Solar cell and method of manufacturing the same patent July 2017

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