skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Off-line-locked laser diode species monitor system

Patent ·
OSTI ID:1531414

An off-line-locked laser diode species monitor system includes: reference means for including at least one known species having a first absorption wavelength; a laser source for irradiating the reference means and at least one sample species having a second absorption wavelength differing from the first absorption wavelength by a predetermined amount; means for locking the wavelength of the laser source to the first wavelength of the at least one known species in the reference means; a controller for defeating the means for locking and for displacing the laser source wavelength from said first absorption wavelength by said predetermined amount to the second absorption wavelength; and a sample detector device for determining laser radiation absorption at the second wavelength transmitted through the sample to detect the presence of the at least one sample species.

Research Organization:
Spectral Sciences Inc., Burlington, MA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-94ER81865
Assignee:
Spectral Sciences, Inc. (Burlington, MA)
Patent Number(s):
5,459,574
Application Number:
08/324,101
OSTI ID:
1531414
Resource Relation:
Patent File Date: 1994-10-14
Country of Publication:
United States
Language:
English

References (3)


Cited By (17)

Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use patent October 1999
In-line cell for absorption spectroscopy patent February 2001
Laser gas analyzer patent June 2017
Method for stabilizing the wavelength in a laser spectrometer system patent April 1998
Laser gas analyzer patent May 2016
Method for measuring the concentration of a gas component in a measuring gas patent January 2011
Remote gas detection apparatus having a microlaser patent April 1999
Analytical system and method for analyzing nonlinear optical signals patent June 2009
Apparatus for and method of analyzing carbon isotopes patent July 1999
Polygonal planar multipass cell, system and apparatus including same, and method of use patent October 1998
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use patent November 2000
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use patent December 2002
Multi-harmonic inline reference cell for optical trace gas sensing patent March 2015
Gas sensor with open optical measurement path patent March 2003
Line-locked diode laser for gas spectroscopy patent July 1999
Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy patent March 1999
Semiconductor processing system and method for controlling moisture level therein patent August 2002

Similar Records

Related Subjects