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High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.4950729· OSTI ID:1530236
 [1];  [2];  [1];  [3];  [4];  [1];  [5];  [6];  [7];  [8];  [5];  [8]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
  2. KLA-Tencor Corp., Milpitas, CA (United States)
  3. The École nationale supérieure d’ingénieurs de Caen, Caen (France)
  4. Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
  5. Physik Instrumente (PI), Karlsruhe (Germany)
  6. Diablo Valley College, Pleasant Hill, CA (United States)
  7. Helmholtz Zentrum, Berlin (Germany); Technical Univ. of Berlin (Germany)
  8. Helmholtz Zentrum, Berlin (Germany)
+ Show Author Affiliations
The ultimate performance of surface slope metrology instrumentation, such as long trace profilers and auto-collimator based deflectometers, is limited by systematic errors that are increased when the entire angular range is used for metrology of significantly curved optics. At the ALS X-Ray Optics Laboratory, in collaboration with the HZB/BESSY-II and PTB (Germany) metrology teams, we are working on a calibration method for deflectometers, based on a concept of a universal test mirror (UTM) [V. V. Yashchuk et al., Proc. SPIE 6704, 67040A (2007)]. Potentially, the UTM method provides high performance calibration and accounts for peculiarities of the optics under test (e.g., slope distribution) and the experimental arrangement (e.g., the distance between the sensor and the optic under test). At the same time, the UTM calibration method is inherently universal, applicable to a variety of optics and experimental arrangements. In this work, we present the results of tests with a key component of the UTM system, a custom high precision tilt stage, which has been recently developed in collaboration with Physik Instrumente, GmbH. The tests have demonstrated high performance of the stage and its capability (after additional calibration) to provide angular calibration of surface slope measuring profilers over the entire instrumental dynamic range with absolute accuracy better than 30 nrad. The details of the stage design and tests are presented. We also discuss the foundation of the UTM method and calibration algorithm, as well as the possible design of a full scale UTM system.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1530236
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 5 Vol. 87; ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

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Cited By (7)

Environmental influences on autocollimator-based angle and form metrology journal February 2019
Influence of the air’s refractive index on precision angle metrology with autocollimators journal May 2018
New operational mode of the pencil beam interferometry based LTP conference September 2016
Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics conference September 2017
New twist in the optical schematic of surface slope measuring long trace profiler conference September 2017
The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors conference November 2018
Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors conference October 2019

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