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Title: SNS Josephson Junctions With Tunable Ta–N Barriers

Journal Article · · IEEE Transactions on Applied Superconductivity

In this paper, we report on the fabrication and characterization of Nb/Ta-N/Nb Josephson junctions grown by room temperature magnetron sputtering on 150-mm diameter Si wafers. Junction characteristics depend upon the Ta-N barrier composition, which was varied by adjusting the N2 flow during film deposition. Higher N2 flow rates raise the barrier resistance and increase the junction critical current. This work demonstrates the viability of Ta-N as an alternative barrier to aluminum oxide, with the potential for large scale integration.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA); Intelligence Advanced Research Projects Activity (IARPA)
Grant/Contract Number:
AC04-94AL85000; NA0003525
OSTI ID:
1526219
Report Number(s):
SAND-2019-5786J; 675764
Journal Information:
IEEE Transactions on Applied Superconductivity, Vol. 29, Issue 5; ISSN 1051-8223
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

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