SNS Josephson Junctions With Tunable Ta–N Barriers
Journal Article
·
· IEEE Transactions on Applied Superconductivity
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
In this paper, we report on the fabrication and characterization of Nb/Ta-N/Nb Josephson junctions grown by room temperature magnetron sputtering on 150-mm diameter Si wafers. Junction characteristics depend upon the Ta-N barrier composition, which was varied by adjusting the N2 flow during film deposition. Higher N2 flow rates raise the barrier resistance and increase the junction critical current. This work demonstrates the viability of Ta-N as an alternative barrier to aluminum oxide, with the potential for large scale integration.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA); Intelligence Advanced Research Projects Activity (IARPA)
- Grant/Contract Number:
- AC04-94AL85000; NA0003525
- OSTI ID:
- 1526219
- Report Number(s):
- SAND-2019-5786J; 675764
- Journal Information:
- IEEE Transactions on Applied Superconductivity, Vol. 29, Issue 5; ISSN 1051-8223
- Publisher:
- Institute of Electrical and Electronics Engineers (IEEE)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 1 work
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