A revisit to atomic layer deposition of zinc oxide using diethylzinc and water as precursors

Cai, Jiyu; Ma, Zhiyuan; Wejinya, Uche; Zou, Min; Liu, Yuzi; Zhou, Hua; Meng, Xiangbo

doi:10.1007/s10853-018-03260-3

Title: A revisit to atomic layer deposition of zinc oxide using diethylzinc and water as precursors

Journal Article · Wed Dec 19 00:00:00 EST 2018 · Journal of Materials Science

DOI:https://doi.org/10.1007/s10853-018-03260-3· OSTI ID:1525987

Cai, Jiyu ^[1]; Ma, Zhiyuan ^[2]; Wejinya, Uche ^[1]; Zou, Min ^[1]; Liu, Yuzi ^[3]; Zhou, Hua ^[3];

^[1]

Univ. of Arkansas, Fayetteville, AR (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); China Univ. of Petroleum, Beijing (China)
Argonne National Lab. (ANL), Argonne, IL (United States)

Nanophase zinc oxide (ZnO) has been widely studied as an important multifunctional material in many applications. Atomic layer deposition (ALD) is a unique thin-film synthesis technique, featuring its extreme uniformity, unrivaled conformal coverage, low deposition temperature, and precise controllability. Using diethylzinc (DEZ) and water as precursors, ALD has been reported previously for growing nanophase ZnO thin films. However, the growth characteristics and the resultant ZnO crystallinity have not been well characterized and understood. To this end, we revisited the ALD process of ZnO using DEZ and water. Through employing a suite of advanced characterization techniques, we systematically addressed the growth characteristics, morphological changes, and the crystallinity evolution of ZnO along with growth temperature in the range of 30-250 °C. The growth characteristics of the ALD ZnO films were investigated using in situ quartz crystal microbalance (QCM), scanning electron microscopy, atomic force microscopy, and synchrotron-based X-ray reflectivity. The crystallinity of the ALD ZnO films was determined using synchrotron-based X-ray diffraction and high-resolution transmission electron microscopy. In addition, through further analyzing QCM data, we proposed the adsorption-limited surface reaction for ALD ZnO growth with the temperature-dependent number of -OH surface group reacting with one DEZ molecule. Furthermore, this study contributes to offer new and deep insights on the fundamental ALD process of ZnO.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1525987

Journal Information:: Journal of Materials Science, Vol. 54, Issue 7; ISSN 0022-2461

Publisher:: SpringerCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 32 works

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References (97)

Growth of zinc oxide nanoflowers by thermal evaporation method Abdulgafour, H. I.; Hassan, Z.; Al-Hardan, N. Physica B: Condensed Matter, Vol. 405, Issue 11 https://doi.org/10.1016/j.physb.2010.03.033	journal	June 2010
Deposition of Tin Oxide into Porous Silicon by Atomic Layer Epitaxy Dücsö, Csaba Journal of The Electrochemical Society, Vol. 143, Issue 2 https://doi.org/10.1149/1.1836500	journal	January 1996
Tin Oxide with Controlled Morphology and Crystallinity by Atomic Layer Deposition onto Graphene Nanosheets for Enhanced Lithium Storage Li, Xifei; Meng, Xiangbo; Liu, Jian Advanced Functional Materials, Vol. 22, Issue 8 https://doi.org/10.1002/adfm.201101068	journal	February 2012
Atomic Layer Deposition on Biological Macromolecules: Metal Oxide Coating of Tobacco Mosaic Virus and Ferritin Knez, Mato; Kadri, Anan; Wege, Christina Nano Letters, Vol. 6, Issue 6 https://doi.org/10.1021/nl060413j	journal	June 2006
Atmospheric pressure chemical vapor deposition of gallium doped zinc oxide thin films from diethyl zinc, water, and triethyl gallium Hu, Jianhua; Gordon, Roy G. Journal of Applied Physics, Vol. 72, Issue 11 https://doi.org/10.1063/1.351977	journal	December 1992
Large scale synthesis of pinhole-free shell-isolated nanoparticles (SHINs) using improved atomic layer deposition (ALD) method for practical applications: Large scale synthesis of pinhole-free SHINs Zhang, Wei; Dong, Jin-Chao; Li, Chao-Yu Journal of Raman Spectroscopy, Vol. 46, Issue 12 https://doi.org/10.1002/jrs.4760	journal	August 2015
Atomic layer deposition of ZnSe/CdSe superlattice nanowires Solanki, R.; Huo, J.; Freeouf, J. L. Applied Physics Letters, Vol. 81, Issue 20 https://doi.org/10.1063/1.1521570	journal	November 2002
Non-Aqueous Approach to Synthesize Amorphous/Crystalline Metal Oxide-Graphene Nanosheet Hybrid Composites Meng, Xiangbo; Geng, Dongsheng; Liu, Jian The Journal of Physical Chemistry C, Vol. 114, Issue 43 https://doi.org/10.1021/jp105852h	journal	October 2010
Atomic Layer Deposition of Al ₂ O ₃ Films on Polyethylene Particles Ferguson, J. D.; Weimer, A. W.; George, S. M. Chemistry of Materials, Vol. 16, Issue 26 https://doi.org/10.1021/cm040008y	journal	December 2004
AAO-assisted synthesis of highly ordered, large-scale TiO2 nanowire arrays via sputtering and atomic layer deposition Yao, Zhao; Wang, Cong; Li, Yang Nanoscale Research Letters, Vol. 10, Issue 1 https://doi.org/10.1186/s11671-015-0872-9	journal	April 2015
High-density phases of ZnO: Structural and compressive parameters Desgreniers, Serge Physical Review B, Vol. 58, Issue 21 https://doi.org/10.1103/PhysRevB.58.14102	journal	December 1998
Atomic Layer Deposition of Lanthanum-Based Ternary Oxides Wang, Hongtao; Wang, Jun-Jieh; Gordon, Roy Electrochemical and Solid-State Letters, Vol. 12, Issue 4 https://doi.org/10.1149/1.3074314	journal	January 2009
Epitaxial growth of ZnO films Triboulet, R.; Perrière, Jacques Progress in Crystal Growth and Characterization of Materials, Vol. 47, Issue 2-3 https://doi.org/10.1016/j.pcrysgrow.2005.01.003	journal	January 2003
A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches Gordon, R. G.; Hausmann, D.; Kim, E. Chemical Vapor Deposition, Vol. 9, Issue 2, p. 73-78 https://doi.org/10.1002/cvde.200390005	journal	March 2003
Stable and High-Performance Flexible ZnO Thin-Film Transistors by Atomic Layer Deposition Lin, Yuan-Yu; Hsu, Che-Chen; Tseng, Ming-Hung ACS Applied Materials & Interfaces, Vol. 7, Issue 40 https://doi.org/10.1021/acsami.5b07278	journal	September 2015
Yolk-shell ZnO-C microspheres with enhanced electrochemical performance as anode material for lithium ion batteries Xie, Qingshui; Zhang, Xiaoqiang; Wu, Xiaobiao Electrochimica Acta, Vol. 125 https://doi.org/10.1016/j.electacta.2014.02.003	journal	April 2014
Growth of Zinc Oxide Nanorods, Tetrapods, and Nanobelts without Catalyst Fouad, O. A. Journal of Nanoscience and Nanotechnology, Vol. 6, Issue 7 https://doi.org/10.1166/jnn.2006.355	journal	July 2006
Texture development of non-epitaxial polycrystalline ZnO films Kajikawa, Yuya Journal of Crystal Growth, Vol. 289, Issue 1 https://doi.org/10.1016/j.jcrysgro.2005.11.089	journal	March 2006
High-Aspect-Ratio TiO ₂ Nanotubes by Anodization of Titanium Macák, Jan M.; Tsuchiya, Hiroaki; Schmuki, Patrik Angewandte Chemie International Edition, Vol. 44, Issue 14 https://doi.org/10.1002/anie.200462459	journal	February 2005
Photoelectron spectroscopy of diethylzinc on the polar surfaces of zinc oxide Vohs, J. M.; Barteau, M. A. Journal of Electron Spectroscopy and Related Phenomena, Vol. 49, Issue 1 https://doi.org/10.1016/0368-2048(89)80039-8	journal	January 1989
Zinc white: a review of zinc oxide pigment properties and implications for stability in oil-based paintings Osmond, Gillian AICCM Bulletin, Vol. 33, Issue 1 https://doi.org/10.1179/bac.2012.33.1.004	journal	December 2012
The quasiparticle band structure of zincblende and rocksalt ZnO Dixit, H.; Saniz, R.; Lamoen, D. Journal of Physics: Condensed Matter, Vol. 22, Issue 12 https://doi.org/10.1088/0953-8984/22/12/125505	journal	March 2010
Controlled synthesis and properties of ZnO nanostructures grown by metalorganic chemical vapor deposition: A review Park, Won Il Metals and Materials International, Vol. 14, Issue 6 https://doi.org/10.3365/met.mat.2008.12.659	journal	December 2008
Elements of Modern X-ray Physics Als-Nielsen, Jens; McMorrow, Des https://doi.org/10.1002/9781119998365	book	March 2011
The lattice-dimensions of zinc oxide Bunn, C. W. Proceedings of the Physical Society, Vol. 47, Issue 5 https://doi.org/10.1088/0959-5309/47/5/307	journal	September 1935
Atomic layer deposition on polymer based flexible packaging materials: Growth characteristics and diffusion barrier properties Kääriäinen, Tommi O.; Maydannik, Philipp; Cameron, David C. Thin Solid Films, Vol. 519, Issue 10 https://doi.org/10.1016/j.tsf.2010.12.171	journal	March 2011
High-filling-fraction inverted ZnS opals fabricated by atomic layer deposition King, J. S.; Neff, C. W.; Summers, C. J. Applied Physics Letters, Vol. 83, Issue 13 https://doi.org/10.1063/1.1609240	journal	September 2003
Growth of (002)-oriented ZnO thin films on largely lattice-mismatched substrates using atomic layer deposition Pung, Swee Yong; Choy, Kwang Leong; Hou, Xianghui International Journal of Nanotechnology, Vol. 10, Issue 3/4 https://doi.org/10.1504/IJNT.2013.053138	journal	January 2013
Negative Resistance Behaviour and Molecular Reorientation Properties of Zinc Oxide Nanoparticles Based Liquid Crystals for High Image Quality Liquid Crystal Displays Al-Senany, Nourah; Al-Ghamdi, Ahmed. A.; Al-Hazmi, Faten Journal of Nanoelectronics and Optoelectronics, Vol. 9, Issue 5 https://doi.org/10.1166/jno.2014.1647	journal	October 2014
The surface reactions of ethyl groups on Si(100) formed via dissociation of adsorbed diethylzinc Rueter, M. A.; Vohs, J. M. Surface Science, Vol. 262, Issue 1-2 https://doi.org/10.1016/0039-6028(92)90458-I	journal	February 1992
Formation of TiO₂ and ZrO₂ Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness Shin, H.; Jeong, D.-K.; Lee, J. Advanced Materials, Vol. 16, Issue 14, p. 1197-1200 https://doi.org/10.1002/adma.200306296	journal	July 2004
Structural and optical properties of high quality ZnO films on Si grown by atomic layer deposition at low temperatures Lee, S.; Im, Y. H.; Kim, S. H. Superlattices and Microstructures, Vol. 39, Issue 1-4 https://doi.org/10.1016/j.spmi.2005.08.028	journal	January 2006
Corrosion Protection of Copper Using Al ₂ O ₃ , TiO ₂ , ZnO, HfO ₂ , and ZrO ₂ Atomic Layer Deposition Daubert, James S.; Hill, Grant T.; Gotsch, Hannah N. ACS Applied Materials & Interfaces, Vol. 9, Issue 4 https://doi.org/10.1021/acsami.6b13571	journal	January 2017
Zinc oxide nanostructures: growth, properties and applications Wang, Zhong Lin Journal of Physics: Condensed Matter, Vol. 16, Issue 25 https://doi.org/10.1088/0953-8984/16/25/R01	journal	June 2004
Study of Atomic Layer Deposition of ZnO on a Polar Oxide Substrate by In Situ Quartz Crystal Microbalance Pradhan, Kallol; Lyman, Paul F. 220th ECS Meeting, ECS Transactions https://doi.org/10.1149/1.3633674	conference	January 2011
Heteroepitaxy of group IV-VI nitrides by atomic layer deposition Klug, Jeffrey A.; Becker, Nicholas G.; Groll, Nickolas R. Applied Physics Letters, Vol. 103, Issue 21 https://doi.org/10.1063/1.4831977	journal	November 2013
Atomic Layer Deposition in Bio-Nanotechnology: A Brief Overview Bishal, Arghya K.; Butt, Arman; Selvaraj, Sathees K. Critical Reviews™ in Biomedical Engineering, Vol. 43, Issue 4 https://doi.org/10.1615/CritRevBiomedEng.2016016456	journal	January 2015
Growth mechanism of atomic layer deposition of zinc oxide: A density functional theory approach Afshar, Amir; Cadien, Kenneth C. Applied Physics Letters, Vol. 103, Issue 25 https://doi.org/10.1063/1.4852655	journal	December 2013
Atomic Layer Deposition of Aluminum Sulfide: Growth Mechanism and Electrochemical Evaluation in Lithium-Ion Batteries Meng, Xiangbo; Cao, Yanqiang; Libera, Joseph A. Chemistry of Materials, Vol. 29, Issue 21 https://doi.org/10.1021/acs.chemmater.7b02175	journal	October 2017
Controlling preferred orientation of ZnO thin films by atomic layer deposition Ko Park, Sang-Hee; Lee, Yong Eui Journal of Materials Science, Vol. 39, Issue 6 https://doi.org/10.1023/B:JMSC.0000017786.81842.ae	journal	March 2004
Surface Chemistry for Atomic Layer Growth George, S. M.; Ott, A. W.; Klaus, J. W. The Journal of Physical Chemistry, Vol. 100, Issue 31, p. 13121-13131 https://doi.org/10.1021/jp9536763	journal	January 1996
Vapor-Phase Atomic-Controllable Growth of Amorphous Li ₂ S for High-Performance Lithium–Sulfur Batteries Meng, Xiangbo; Comstock, David J.; Fister, Timothy T. ACS Nano, Vol. 8, Issue 10 https://doi.org/10.1021/nn505480w	journal	October 2014
Preparation and characterization of nanocrystalline zinc oxide by a novel solvothermal oxidation route Chen, Shu-Jian; Li, Li-Hong; Chen, Xue-Tai Journal of Crystal Growth, Vol. 252, Issue 1-3 https://doi.org/10.1016/S0022-0248(02)02495-8	journal	May 2003
Zinc oxide nanorod based photonic devices: recent progress in growth, light emitting diodes and lasers Willander, M.; Nur, O.; Zhao, Q. X. Nanotechnology, Vol. 20, Issue 33 https://doi.org/10.1088/0957-4484/20/33/332001	journal	July 2009
Preferential growth of ZnO thin films by the atomic layer deposition technique Pung, Swee-Yong; Choy, Kwang-Leong; Hou, Xianghui Nanotechnology, Vol. 19, Issue 43 https://doi.org/10.1088/0957-4484/19/43/435609	journal	September 2008
Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011̄2) sapphire by metalorganic chemical vapor deposition Gorla, C. R.; Emanetoglu, N. W.; Liang, S. Journal of Applied Physics, Vol. 85, Issue 5 https://doi.org/10.1063/1.369577	journal	March 1999
Self-organized formation of hexagonal pore arrays in anodic alumina Jessensky, O.; Müller, F.; Gösele, U. Applied Physics Letters, Vol. 72, Issue 10 https://doi.org/10.1063/1.121004	journal	March 1998
Advances in ZnO-based materials for light emitting diodes Pearton, S. J.; Ren, F. Current Opinion in Chemical Engineering, Vol. 3 https://doi.org/10.1016/j.coche.2013.11.002	journal	February 2014
Atomic Layer Deposition of Undoped and Al-Doped ZnO Thin Films Usingthe Zn Alkoxide Precursor Methylzinc Isopropoxide An, Ki-Seok; Cho, Wontae; Lee, Byung Kook Journal of Nanoscience and Nanotechnology, Vol. 8, Issue 9 https://doi.org/10.1166/jnn.2008.IC47	journal	September 2008
Hartree-Fock study of phase changes in ZnO at high pressure Jaffe, J. E.; Hess, A. C. Physical Review B, Vol. 48, Issue 11 https://doi.org/10.1103/PhysRevB.48.7903	journal	September 1993
Electro-optical properties of liquid crystal displays based on the transparent zinc oxide films treated by using a rubbing method Park, Hong-Gyu; Kim, Eun-Mi; Heo, Gi-Seok Optical Materials, Vol. 75 https://doi.org/10.1016/j.optmat.2017.10.031	journal	January 2018
Zinc oxide nanowires Cui, Jingbiao Materials Characterization, Vol. 64 https://doi.org/10.1016/j.matchar.2011.11.017	journal	February 2012
Precise control of highly ordered arrays of nested semiconductor/metal nanotubes Gu, Diefeng; Baumgart, Helmut; Tapily, Kandabara Nano Research, Vol. 4, Issue 2 https://doi.org/10.1007/s12274-010-0066-9	journal	December 2010
Zinc chalcogenide thin films grown by the atomic layer epitaxy technique using zinc acetate as source material Tammenmaa, M.; Koskinen, T.; Hiltunen, L. Thin Solid Films, Vol. 124, Issue 2 https://doi.org/10.1016/0040-6090(85)90254-8	journal	February 1985
Fundamentals of zinc oxide as a semiconductor Janotti, Anderson; Van de Walle, Chris G. Reports on Progress in Physics, Vol. 72, Issue 12 https://doi.org/10.1088/0034-4885/72/12/126501	journal	October 2009
MOF-Derived Porous ZnO/ZnFe ₂ O ₄ /C Octahedra with Hollow Interiors for High-Rate Lithium-Ion Batteries Zou, Feng; Hu, Xianluo; Li, Zhen Advanced Materials, Vol. 26, Issue 38 https://doi.org/10.1002/adma.201402322	journal	August 2014
Orientation and size dependence of the elastic properties of zinc oxide nanobelts Kulkarni, A. J.; Zhou, M.; Ke, F. J. Nanotechnology, Vol. 16, Issue 12 https://doi.org/10.1088/0957-4484/16/12/001	journal	October 2005
Preparation and Elastic Properties of Helical Nanotubes Obtained by Atomic Layer Deposition with Carbon Nanocoils as Templates Qin, Yong; Kim, Yunseok; Zhang, Lianbing Small, Vol. 6, Issue 8 https://doi.org/10.1002/smll.200902159	journal	April 2010
Zinc oxide - analogue of GaN with new perspective possibilities Karpina, V. A.; Lazorenko, V. I.; Lashkarev, C. V. Crystal Research and Technology, Vol. 39, Issue 11 https://doi.org/10.1002/crat.200310283	journal	November 2004
Atomic layer deposition for high aspect ratio through silicon vias Knaut, Martin; Junige, Marcel; Neumann, Volker Microelectronic Engineering, Vol. 107 https://doi.org/10.1016/j.mee.2013.01.031	journal	July 2013
The influence of growth temperature and precursors’ doses on electrical parameters of ZnO thin films grown by atomic layer deposition technique Krajewski, T.; Guziewicz, E.; Godlewski, M. Microelectronics Journal, Vol. 40, Issue 2 https://doi.org/10.1016/j.mejo.2008.07.053	journal	February 2009
Vertical nanowire light-emitting diode Könenkamp, R.; Word, Robert C.; Schlegel, C. Applied Physics Letters, Vol. 85, Issue 24 https://doi.org/10.1063/1.1836873	journal	December 2004
Femtosecond laser direct writing of microholes on roughened ZnO for output power enhancement of InGaN light-emitting diodes Zang, Zhigang; Zeng, Xiaofeng; Du, Jihe Optics Letters, Vol. 41, Issue 15 https://doi.org/10.1364/OL.41.003463	journal	January 2016
Atomic Layer Deposition of Gallium Sulfide Films Using Hexakis(dimethylamido)digallium and Hydrogen Sulfide Meng, Xiangbo; Libera, Joseph A.; Fister, Timothy T. Chemistry of Materials, Vol. 26, Issue 2 https://doi.org/10.1021/cm4031057	journal	December 2013
Atomic layer deposition for nanostructured Li-ion batteries Knoops, H. C. M.; Donders, M. E.; van de Sanden, M. C. M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3660699	journal	January 2012
Single Crystal Nanowire Vertical Surround-Gate Field-Effect Transistor Ng, Hou T.; Han, J.; Yamada, Toshishige Nano Letters, Vol. 4, Issue 7 https://doi.org/10.1021/nl049461z	journal	July 2004
Synthesis and optical properties of tetrapod-like zinc oxide nanorods Dai, Y.; Zhang, Y.; Li, Q. K. Chemical Physics Letters, Vol. 358, Issue 1-2, p. 83-86 https://doi.org/10.1016/S0009-2614(02)00582-1	journal	May 2002
High-Mobility ZnO Thin Film Transistors Based on Solution-processed Hafnium Oxide Gate Dielectrics Esro, Mazran; Vourlias, George; Somerton, Christopher Advanced Functional Materials, Vol. 25, Issue 1 https://doi.org/10.1002/adfm.201402684	journal	November 2014
Oxidant-Dependent Thermoelectric Properties of Undoped ZnO Films by Atomic Layer Deposition Kim, Hyunho; Wang, Zhenwei; Hedhili, Mohamed N. Chemistry of Materials, Vol. 29, Issue 7 https://doi.org/10.1021/acs.chemmater.6b04654	journal	March 2017
Synthesis and characterization of zinc oxide nanoparticles: application to textiles as UV-absorbers Becheri, Alessio; Dürr, Maximilian; Lo Nostro, Pierandrea Journal of Nanoparticle Research, Vol. 10, Issue 4 https://doi.org/10.1007/s11051-007-9318-3	journal	October 2007
Atomic Layer Deposition of Insulating Hafnium and Zirconium Nitrides Becker, Jill S.; Kim, Esther; Gordon, Roy G. Chemistry of Materials, Vol. 16, Issue 18 https://doi.org/10.1021/cm049516y	journal	September 2004
Atomic layer deposition of transition metals Lim, Booyong S.; Rahtu, Antti; Gordon, Roy G. Nature Materials, Vol. 2, Issue 11 https://doi.org/10.1038/nmat1000	journal	October 2003
Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation Malm, Jari; Sahramo, Elina; Perälä, Juho Thin Solid Films, Vol. 519, Issue 16 https://doi.org/10.1016/j.tsf.2011.02.024	journal	June 2011
Room-Temperature Atomic Layer Deposition of Al ₂ O ₃ : Impact on Efficiency, Stability and Surface Properties in Perovskite Solar Cells Kot, Malgorzata; Das, Chittaranjan; Wang, Zhiping ChemSusChem, Vol. 9, Issue 24 https://doi.org/10.1002/cssc.201601186	journal	December 2016
Controllable synthesis of graphene-based titanium dioxide nanocomposites by atomic layer deposition Meng, Xiangbo; Geng, Dongsheng; Liu, Jian Nanotechnology, Vol. 22, Issue 16 https://doi.org/10.1088/0957-4484/22/16/165602	journal	March 2011
Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry Yousfi, El Bekkaye; Fouache, Jacques; Lincot, Daniel Applied Surface Science, Vol. 153, Issue 4, p. 223-234 https://doi.org/10.1016/S0169-4332(99)00330-X	journal	January 2000
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
Zinc oxide: hydrothermal growth of nano- and bulk crystals and their luminescent properties Dem'yanets, L. N.; Li, L. E.; Uvarova, T. G. Journal of Materials Science, Vol. 41, Issue 5 https://doi.org/10.1007/s10853-006-7457-z	journal	March 2006
Atomic Layer Deposition of Electron Selective SnO _x and ZnO Films on Mixed Halide Perovskite: Compatibility and Performance Hultqvist, Adam; Aitola, Kerttu; Sveinbjörnsson, Kári ACS Applied Materials & Interfaces, Vol. 9, Issue 35 https://doi.org/10.1021/acsami.7b07627	journal	August 2017
Atomic layer epitaxy Suntola, Tuomo Thin Solid Films, Vol. 216, Issue 1 https://doi.org/10.1016/0040-6090(92)90874-B	journal	August 1992
A high-performing nanostructured TiO2 filter for volatile organic compounds using atomic layer deposition Lee, Hye Jin; Seo, Hyun Ook; Kim, Dong Wun Chemical Communications, Vol. 47, Issue 19 https://doi.org/10.1039/c1cc10307e	journal	January 2011
Atomic layer deposition of zinc oxide films: Effects of nanocrystalline characteristics on tribological performance Chai, Zhimin; Lu, Xinchun; He, Dannong Surface and Coatings Technology, Vol. 207 https://doi.org/10.1016/j.surfcoat.2012.07.021	journal	August 2012
Lattice dynamics and hyperfine interactions in ZnO and ZnSe at high external pressures Karzel, H.; Potzel, W.; Köfferlein, M. Physical Review B, Vol. 53, Issue 17 https://doi.org/10.1103/PhysRevB.53.11425	journal	May 1996
Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition Knez, M.; Nielsch, K.; Niinistö, L. Advanced Materials, Vol. 19, Issue 21, p. 3425-3438 https://doi.org/10.1002/adma.200700079	journal	November 2007
Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions Klaus, J. W.; George, S. M. Surface Science, Vol. 447, Issue 1-3 https://doi.org/10.1016/S0039-6028(99)01119-X	journal	February 2000
Atomic Layer Deposition of Metal Tellurides and Selenides Using Alkylsilyl Compounds of Tellurium and Selenium Pore, Viljami; Hatanpää, Timo; Ritala, Mikko Journal of the American Chemical Society, Vol. 131, Issue 10 https://doi.org/10.1021/ja8090388	journal	March 2009
A comprehensive review of ZnO materials and devices Özgür, Ü.; Alivov, Ya. I.; Liu, C. Journal of Applied Physics, Vol. 98, Issue 4 https://doi.org/10.1063/1.1992666	journal	August 2005
Atomic layer epitaxy growth of doped zinc oxide thin films from organometals Lujala, Vesa; Skarp, Jarmo; Tammenmaa, Markku Applied Surface Science, Vol. 82-83 https://doi.org/10.1016/0169-4332(94)90192-9	journal	December 1994
Room-Temperature Atomic Layer Deposition of Platinum Mackus, Adriaan J. M.; Garcia-Alonso, Diana; Knoops, Harm C. M. Chemistry of Materials, Vol. 25, Issue 9 https://doi.org/10.1021/cm400274n	journal	April 2013
Growth by atomic layer epitaxy and characterization of thin films of ZnO: Growth by atomic layer epitaxy and characterization of thin ZnO films Kopalko, K.; Wójcik, A.; Godlewski, M. physica status solidi (c), Vol. 2, Issue 3 https://doi.org/10.1002/pssc.200460660	journal	February 2005
Atomic layer deposition of ZnO: a review Tynell, Tommi; Karppinen, Maarit Semiconductor Science and Technology, Vol. 29, Issue 4 https://doi.org/10.1088/0268-1242/29/4/043001	journal	February 2014
Atomic layer deposition of ZnO on ultralow-density nanoporous silica aerogel monoliths Kucheyev, S. O.; Biener, J.; Wang, Y. M. Applied Physics Letters, Vol. 86, Issue 8 https://doi.org/10.1063/1.1870122	journal	February 2005
Quartz Crystal Microbalance Studies of Al ₂ O ₃ Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C ^† Wind, R. A.; George, S. M. The Journal of Physical Chemistry A, Vol. 114, Issue 3 https://doi.org/10.1021/jp9049268	journal	January 2010
Atomic Layer Epitaxy Bedair, S. M. IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits, 1987. ., IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits, 1987. Proceedings. https://doi.org/10.1109/cornel.1987.721219	conference	January 1987
Atomic layer epitaxy Niinistö, Lauri Current Opinion in Solid State and Materials Science, Vol. 3, Issue 2 https://doi.org/10.1016/s1359-0286(98)80080-6	journal	April 1998
Heteroepitaxy of Group IV-VI Nitrides by Atomic Layer Deposition Klug, Jeffrey A.; Becker, Nicholas G.; Groll, Nickolas R. arXiv https://doi.org/10.48550/arxiv.1309.1789	text	January 2013
Atomic Layer Epitaxy Suntola, Tuomo Extended Abstracts of the 1984 International Conference on Solid State Devices and Materials https://doi.org/10.7567/ssdm.1984.d-10-1	conference	January 1984

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