Graphene milling dynamics during helium ion beam irradiation

Kim, Songkil; Dyck, Ondrej; Ievlev, Anton V.; Vlassiouk, Ivan V.; Kalinin, Sergei V.; Belianinov, Alex; Jesse, Stephen; Ovchinnikova, Olga S.

doi:10.1016/j.carbon.2018.06.017

Graphene milling dynamics during helium ion beam irradiation

Journal Article · Thu Jun 14 00:00:00 EDT 2018 · Carbon

DOI:https://doi.org/10.1016/j.carbon.2018.06.017· OSTI ID:1509549

Kim, Songkil ^[1]; ^[2]; ^[2]; ^[2]; ^[2]; ^[2]; ^[2]; ^[2]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Pusan National Univ., Busan (South Korea)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

We explore the potential of the Helium Ion Microscope (HIM) as a tool for direct-write patterning of graphene and describe the underlying processes of graphene milling with image data processing. Controlled helium ion irradiation of suspended graphene conducted while monitoring the mill in-situ revealed the localized formation of nanopores, their growth, and coalescence. We also explore the effects of defects on the milling dynamics, and show that pre-exposed membranes rupture by cracking and rapid crack propagation at the edges of the growing defects. The mechanism for the rupturing process is described by local defect formation by excessive irradiation of helium ions, dictated by the scanning direction of the beam. As a result, these findings enrich fundamental understanding of the graphene milling process with a helium ion beam that, is necessary for high-resolution and high throughput patterning of graphene with nanoscale precision.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1509549

Alternate ID(s):: OSTI ID: 1548134

Journal Information:: Carbon, Journal Name: Carbon Journal Issue: C Vol. 138; ISSN 0008-6223

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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