Multilayer Dielectric Gratings for Petawatt-Class Laser Systems
Existing Petawatt class lasers today based on Nd:glass architectures operating at nominally 500 J, 0.5 ps use meter-scale aperture, gold-overcoated master photoresist gratings to compress the amplified chirped pulse. Many lasers operating in the >lkJ, >Ips regime are in the planning stages around the world. These will require multilayer dielectric diffraction gratings to handle larger peak powers than can be accommodated with gold gratings. Models of the electric field distribution in the solid material of these gratings suggest that high aspect-ratio structures used at high incidence angles will have better laser damage resistance. New tooling for transfer etching these submicron-grating patterns and for nondestructive critical-dimension measurement of these features on meter-scale substrates will be described.
- Research Organization:
- Lawrence Livermore National Lab., CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 15006527
- Report Number(s):
- UCRL-CONF-154956
- Country of Publication:
- United States
- Language:
- English
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