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Stretchable Micro-Electrode Array

Conference ·
OSTI ID:15005307
This paper focuses on the design consideration, fabrication processes and preliminary testing of the stretchable micro-electrode array. We are developing an implantable, stretchable micro-electrode array using polymer-based microfabrication techniques. The device will serve as the interface between an electronic imaging system and the human eye, directly stimulating retinal neurons via thin film conducting traces and electroplated electrodes. The metal features are embedded within a thin ({approx}50 micron) substrate fabricated using poly (dimethylsiloxane) (PDMS), a biocompatible elastomeric material that has very low water permeability. The conformable nature of PDMS is critical for ensuring uniform contact with the curved surface of the retina. To fabricate the device, we developed unique processes for metalizing PDMS to produce robust traces capable of maintaining conductivity when stretched (5%, SD 1.5), and for selectively passivating the conductive elements. An in situ measurement of residual strain in the PDMS during curing reveals a tensile strain of 10%, explaining the stretchable nature of the thin metalized devices.
Research Organization:
Lawrence Livermore National Lab., CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
15005307
Report Number(s):
UCRL-JC-147676
Country of Publication:
United States
Language:
English