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Fundamental nature of ion–solid interactions in SiC

Journal Article · · Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
 [1];  [1];  [1];  [2]
  1. Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
  2. Angstrom Lab., Uppsala (Sweden)

The integration of experimental and computer simulation studies is providing atomic-level understanding of the nature of ion-beam modification in SiC. Density functional theory calculations and molecular dynamics simulations are used to determine stable defect configurations, defect production, and cascade-overlap effects. These studies show that ion implantation in SiC results primarily in the creation of interstitials, vacancies, antisite defects, and small defect clusters that interact to produce long-range structural disorder. The accumulation of damage and defect configurations on both the Si and C sublattices have been determined for a range of ions using multi-axial channeling measurements. The consistent agreement of the experimental and computational results provides atomic-level insights into the interpretation of experimentally observed features.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States). Environmental Molecular Sciences Laboratory (EMSL)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC06-76RL01830
OSTI ID:
15004487
Report Number(s):
PNNL-SA--37028; 3448; KC0201020
Journal Information:
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Journal Name: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms Journal Issue: C Vol. 206; ISSN 0168-583X
Publisher:
Elsevier
Country of Publication:
United States
Language:
English

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