Improvements in the accuracy and the repeatability of long trace profiler measurements.
No abstract prepared.
- Research Organization:
- Advanced Photon Source, Argonne National Lab., IL (US); Brookhaven National Lab. (BNL), Upton, NY (United States); LBL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 15002908
- Journal Information:
- Applied Optics, Vol. 38, Issue 25; Other Information: PBD: 1 Sep 1999; Related Information: Sep. 1, 1999
- Country of Publication:
- United States
- Language:
- English
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