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Title: Tomography of integrated circuit interconnect with an electromigration void.

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Advanced Photon Source, Argonne National Lab., IL (US); NIST; Intel Corp. (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
15002816
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 87; Journal Issue: 9, pt.1; Other Information: PBD: 1 May 2000; Related Information: May 1, 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; CONNECTORS; ELECTROPHORESIS; INTEGRATED CIRCUITS; TOMOGRAPHY; ADVANCED PHOTON SOURCE

Citation Formats

Levine, Z. H., Kalukin, A. R., Kuhn, M., Frigo, S. P., McNulty, I., Retsch, C. C., Wang, Y., Arp, U., Lucatorto, T. B., Ravel, B. D., Tarrio, C., and XFD. Tomography of integrated circuit interconnect with an electromigration void.. United States: N. p., 2000. Web. doi:10.1063/1.373095.
Levine, Z. H., Kalukin, A. R., Kuhn, M., Frigo, S. P., McNulty, I., Retsch, C. C., Wang, Y., Arp, U., Lucatorto, T. B., Ravel, B. D., Tarrio, C., & XFD. Tomography of integrated circuit interconnect with an electromigration void.. United States. doi:10.1063/1.373095.
Levine, Z. H., Kalukin, A. R., Kuhn, M., Frigo, S. P., McNulty, I., Retsch, C. C., Wang, Y., Arp, U., Lucatorto, T. B., Ravel, B. D., Tarrio, C., and XFD. Mon . "Tomography of integrated circuit interconnect with an electromigration void.". United States. doi:10.1063/1.373095.
@article{osti_15002816,
title = {Tomography of integrated circuit interconnect with an electromigration void.},
author = {Levine, Z. H. and Kalukin, A. R. and Kuhn, M. and Frigo, S. P. and McNulty, I. and Retsch, C. C. and Wang, Y. and Arp, U. and Lucatorto, T. B. and Ravel, B. D. and Tarrio, C. and XFD},
abstractNote = {No abstract prepared.},
doi = {10.1063/1.373095},
journal = {Journal of Applied Physics},
number = 9, pt.1,
volume = 87,
place = {United States},
year = {2000},
month = {5}
}