Reflectance, Optical Properties, and Stability of Molybdenum/Strontium and Molybdenum/Yttrium Multilayer Mirrors
- Univ. of California, Davis, CA (United States)
The motivation of this work is to develop high reflectance normal-incidence multilayer mirrors in the 8-12 nm wavelength region for applications in astronomy and extreme ultraviolet lithography. To achieve this goal, Mo/Sr and Mo/Y multilayers were studied. These multilayers were deposited with a UHV magnetron sputtering system and their reflectances were measured with synchrotron radiation. High normal-incidence reflectances of 23% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were achieved. However, the reflectance of Mo/Sr multilayers decreased rapidly after exposure to air. Attempts to use thin layers of carbon to passivate the surface of Mo/Sr multilayers were unsuccessful. Experimental results on the refractive index $$\tilde{n}$$ = 1-δ + iβ of yttrium and molybdenum in the 50-1300 eV energy region are reported in this work. This is the first time ever that values on the refractive index of yttrium are measured in this energy range. The absorption part β was determined through transmittance measurements. The dispersive part δ was calculated by means of the Kramers-Kronig formalism. The newly determined values of the refractive index of molybdenum are in excellent agreement with the published data. Those of yttrium are more accurate and contain fine structures around the yttrium M-absorption edges where Mo/Y multilayers operate. These improved sets of optical data lead to better design and modeling of the optical properties of Mo/Y multilayers. The reflectance quality of Mo/Y multilayers is dependent on their optical and structural properties. To correlate these properties with the multilayer reflectance, x-ray diffraction, Rutherford backscattering spectrometry, and transmission electron microscopy were used to analyze samples. Normal-incidence reflectances of 32.6% at 9.27 nm, 38.4% at 9.48 nm, and 29.6% at 9.46 nm were obtained from three representative Mo/Y multilayers which had about 0%, 25%, and 39% atomic oxygen assimilated in their yttrium layers, respectively. Based on the optical properties, multilayers with higher oxygen content should have higher absorption. However, the 25%-oxygen multilayer had less interface roughness and thus had higher reflectance than the 0%-oxygen sample. The 39%-oxygen multilayer had the highest absorption and roughness, thus had the lowest reflectance among three samples. The optical and structural properties of the multilayers are competing in the reflectance results.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 15002102
- Report Number(s):
- UCRL-LR-150541; TRN: US200408%%82
- Resource Relation:
- Other Information: TH: Thesis (Ph.D.); Thesis submitted to the Univ. of California, Davis, CA (US); PBD: 1 Sep 2002
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
ENERGY RANGE
FINE STRUCTURE
MIRRORS
MOLYBDENUM
OPTICAL PROPERTIES
REFRACTIVE INDEX
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SIMULATION
STABILITY
SYNCHROTRON RADIATION
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
YTTRIUM