Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong

doi:10.1007/s11837-018-3141-4

Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Journal Article · Mon Sep 24 00:00:00 EDT 2018 · JOM. Journal of the Minerals, Metals & Materials Society

DOI:https://doi.org/10.1007/s11837-018-3141-4· OSTI ID:1491681

Subramanian, Ashwanth ^[1]; Tiwale, Nikhil ^[2]; ^[3]

Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials
Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering; Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials

Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. Recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.

View Accepted Manuscript (DOE)

Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: SC0012704

OSTI ID:: 1491681

Report Number(s):: BNL--210906-2019-JAAM

Journal Information:: JOM. Journal of the Minerals, Metals & Materials Society, Journal Name: JOM. Journal of the Minerals, Metals & Materials Society Journal Issue: 1 Vol. 71; ISSN 1047-4838

Publisher:: SpringerCopyright Statement

Country of Publication:: United States

Language:: English

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