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High-density electrical and optical probes for neural readout and light focusing in deep brain tissue

Journal Article · · Journal of Micro/Nanolithography, MEMS, and MOEMS
 [1];  [2];  [3];  [4];  [1];  [1];  [1];  [4];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility; Univ. of California, Berkeley, CA (United States)
  3. aBeam Technologies, Hayward, CA (United States)
  4. Univ. of California, Berkeley, CA (United States)
+ Show Author Affiliations
To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1490701
Journal Information:
Journal of Micro/Nanolithography, MEMS, and MOEMS, Journal Name: Journal of Micro/Nanolithography, MEMS, and MOEMS Journal Issue: 2 Vol. 17; ISSN 1932-5150
Publisher:
SPIECopyright Statement
Country of Publication:
United States
Language:
English

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Cited By (2)

Tapered Fibers Combined With a Multi-Electrode Array for Optogenetics in Mouse Medial Prefrontal Cortex journal October 2018
Recent Progress on Non-Conventional Microfabricated Probes for the Chronic Recording of Cortical Neural Activity journal March 2019

Figures / Tables (7)

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Related Subjects

47 OTHER INSTRUMENTATION
59 BASIC BIOLOGICAL SCIENCES
high density
integration
light focusing
neural probes