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Anomalously High Thermal Conductivity of Amorphous Si Deposited by Hot-Wire Chemical Vapor Deposition

Journal Article · · Physical Review. B, Condensed Matter and Materials Physics
Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
DOE Contract Number:
AC36-08GO28308
OSTI ID:
1488829
Report Number(s):
NREL/JA-520-48251
Journal Information:
Physical Review. B, Condensed Matter and Materials Physics, Journal Name: Physical Review. B, Condensed Matter and Materials Physics Journal Issue: 10 Vol. 81; ISSN 1098-0121; ISSN PRBMDO
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English

References (25)

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Energetic, vibrational, and electronic properties of silicon using a nonorthogonal tight-binding model journal August 2000
Reaction kinetics in silicon chemical vapor deposition journal October 2002
Thermal conductivity of Si/SiGe and SiGe/SiGe superlattices journal March 2002
Model investigation of the Raman spectra of amorphous silicon journal February 1997
Lattice vibration of amorphous and disordered crystalline silicon journal May 2000
High Thermal Conductivity of a Hydrogenated Amorphous Silicon Film journal January 2009
Frequency dependence of the thermal conductivity of semiconductor alloys journal August 2007
Real space information from fluctuation electron microscopy: applications to amorphous silicon journal October 2007
Comparison of the 3ω method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors journal March 2009
Thermal conductance of interfaces between highly dissimilar materials journal April 2006
Stress and Silicon Nitride: A Crack in the Universal Dissipation of Glasses journal June 2009
Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering journal October 1977
Analysis of heat flow in layered structures for time-domain thermoreflectance journal December 2004
Amorphous Solid without Low Energy Excitations journal June 1997
Lower limit to the thermal conductivity of disordered crystals journal September 1992
Thermal Conductivity Imaging of Thermal Barrier Coatings journal July 2005
Thermal conductance of epitaxial interfaces journal February 2003
Thermal Conductivity and Specific Heat of Thin-Film Amorphous Silicon journal February 2006
Internal friction of amorphous and nanocrystalline silicon at low temperatures journal December 2006
Recent developments in hot wire amorphous silicon journal May 1998
Ultralow Thermal Conductivity in Disordered, Layered WSe2 Crystals journal January 2007
Deposition of device quality, low H content amorphous silicon journal May 1991
Thermal conductivity of epitaxial layers of dilute SiGe alloys journal June 2005

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