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U.S. Department of Energy
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Understanding phosphorus donor insertion on Si(001) from PH3 dissociation in dimer windows formed by hydrogen lithography.

Conference ·
OSTI ID:1488743

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1488743
Report Number(s):
SAND2017-13633C; 659582
Resource Relation:
Conference: Proposed for presentation at the MRS 2017 Fall Meeting held November 26 - December 1, 2017 in Boston, MA.
Country of Publication:
United States
Language:
English