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Title: Microwave Frequency Comb from a Semiconductor in a Scanning Tunneling Microscope

Journal Article · · Microscopy and Microanalysis

Abstract Quasi-periodic excitation of the tunneling junction in a scanning tunneling microscope, by a mode-locked ultrafast laser, superimposes a regular sequence of 15 fs pulses on the DC tunneling current. In the frequency domain, this is a frequency comb with harmonics at integer multiples of the laser pulse repetition frequency. With a gold sample the 200th harmonic at 14.85 GHz has a signal-to-noise ratio of 25 dB, and the power at each harmonic varies inversely with the square of the frequency. Now we report the first measurements with a semiconductor where the laser photon energy must be less than the bandgap energy of the semiconductor; the microwave frequency comb must be measured within 200μm of the tunneling junction; and the microwave power is 25 dB below that with a metal sample and falls off more rapidly at the higher harmonics. Our results suggest that the measured attenuation of the microwave harmonics is sensitive to the semiconductor spreading resistance within 1 nm of the tunneling junction. This approach may enable sub-nanometer carrier profiling of semiconductors without requiring the diamond nanoprobes in scanning spreading resistance microscopy.

Research Organization:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Organization:
USDOE Office of Science (SC). Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
89233218CNA000001
OSTI ID:
1483526
Report Number(s):
LA-UR-18-23275; applab
Journal Information:
Microscopy and Microanalysis, Vol. 23, Issue 02; ISSN 1431-9276
Publisher:
Microscopy Society of America (MSA)
Country of Publication:
United States
Language:
English

References (14)

Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors
  • Hagmann, Mark J.; Andrei, Petru; Pandey, Shashank
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 2 https://doi.org/10.1116/1.4905095
journal December 2014
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Photoassisted scanning tunneling microscopy journal February 2002
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Microwave frequency-comb generation in a tunneling junction by intermode mixing of ultrafast laser pulses journal July 2011
Terahertz Frequency Metrology Based on Frequency Comb journal January 2011
On the effects of a pressure induced amorphous silicon layer on consecutive spreading resistance microscopy scans of doped silicon journal June 2015
Linewidth of the harmonics in a microwave frequency comb generated by focusing a mode-locked ultrafast laser on a tunneling junction journal December 2013
Dopant/carrier profiling for 3D-structures: Dopant/carrier profiling for 3D-structures journal December 2013

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