Acoustic waveguiding in a silicon carbide phononic crystals at microwave frequencies

Baboly, M. Ghasemi; Reinke, Charles M.; Griffin, Benjamin A.; El-Kady, Ihab F.; Leseman, Z. C.

doi:10.1063/1.5016380

Acoustic waveguiding in a silicon carbide phononic crystals at microwave frequencies

Journal Article · Sun Mar 04 23:00:00 EST 2018 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.5016380· OSTI ID:1476935

^[1]; Reinke, Charles M. ^[2]; Griffin, Benjamin A. ^[2]; El-Kady, Ihab F. ^[2]; Leseman, Z. C. ^[3]

Univ. of Jamestown, Jamestown, ND (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Kansas State Univ., Manhattan, KS (United States)

Two dimensional SiC–air phononic crystals have been modeled, fabricated, and tested with a measured bandgap ranging from 665 to 693 MHz. Snowflake air inclusions on a hexagonal lattice were used for the phononic crystal. By manipulating the phononic crystal lattice and inserting circular inclusions, a waveguide was created at 680 MHz. The combined insertion loss and propagation loss for the waveguide is 8.2 dB, i.e., 39% of the energy is guided due to the high level of the confinement afforded by the phononic crystal. In conclusion, the SiC–air phononic crystals and waveguides were fabricated using a CMOS-compatible process, which allows for seamless integration of these devices into wireless communication systems operating at microwave frequencies.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1476935

Report Number(s):: SAND--2018-10596J; 668175

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 10 Vol. 112; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (38)

The mechanical characterization of carbon-nanotube-reinforced polymer-matrix nanocomposites: An unfolding story of interface Ganesan, Yogeeswaran; Lou, Jun JOM, Vol. 61, Issue 1 https://doi.org/10.1007/s11837-009-0005-y	journal	January 2009
Multiple wide complete bandgaps of two-dimensional phononic crystal slabs with cross-like holes Wang, Yan-Feng; Wang, Yue-Sheng Journal of Sound and Vibration, Vol. 332, Issue 8 https://doi.org/10.1016/j.jsv.2012.11.031	journal	April 2013
Enhanced plane wave expansion analysis for the band structure of bulk modes in two-dimensional high-contrast solid–solid phononic crystals Baboly, Mohammadhosein Ghasemi; Soliman, Yasser; Su, Mehmet F. Photonics and Nanostructures - Fundamentals and Applications, Vol. 12, Issue 5 https://doi.org/10.1016/j.photonics.2014.08.001	journal	November 2014
Microfabricated VHF acoustic crystals and waveguides Olsson, Roy H.; El-Kady, Ihab F.; Su, Mehmet F. Sensors and Actuators A: Physical, Vol. 145-146 https://doi.org/10.1016/j.sna.2007.10.081	journal	July 2008
Simultaneous high-Q confinement and selective direct piezoelectric excitation of flexural and extensional lateral vibrations in a silicon phononic crystal slab resonator Mohammadi, Saeed; Eftekhar, Ali. A.; Pourabolghasem, Reza Sensors and Actuators A: Physical, Vol. 167, Issue 2 https://doi.org/10.1016/j.sna.2011.03.014	journal	June 2011
Pulsed vacuum and etching systems: Theoretical design considerations for a pulsed vacuum system and its application to XeF2 etching of Si Mousavi, Arash Kheyraddini; Abbas, Khawar; Elahi, Mirza Mohammad Mahbube Vacuum, Vol. 109 https://doi.org/10.1016/j.vacuum.2014.07.028	journal	November 2014
A picogram- and nanometre-scale photonic-crystal optomechanical cavity Eichenfield, Matt; Camacho, Ryan; Chan, Jasper Nature, Vol. 459, Issue 7246, p. 550-555 https://doi.org/10.1038/nature08061	journal	May 2009
Control of coherent information via on-chip photonic–phononic emitter–receivers Shin, Heedeuk; Cox, Jonathan A.; Jarecki, Robert Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms7427	journal	March 2015
Thermal transport in phononic crystals and the observation of coherent phonon scattering at room temperature Alaie, Seyedhamidreza; Goettler, Drew F.; Su, Mehmet Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms8228	journal	June 2015
Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators Ghaffari, Shirin; Chandorkar, Saurabh A.; Wang, Shasha Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep03244	journal	November 2013
Two-dimensional phononic crystal with tunable narrow pass band: Application to a waveguide with selective frequency Khelif, A.; Deymier, P. A.; Djafari-Rouhani, B. Journal of Applied Physics, Vol. 94, Issue 3 https://doi.org/10.1063/1.1557776	journal	August 2003
Guiding and bending of acoustic waves in highly confined phononic crystal waveguides Khelif, A.; Choujaa, A.; Benchabane, S. Applied Physics Letters, Vol. 84, Issue 22 https://doi.org/10.1063/1.1757642	journal	May 2004
Complete band gaps and deaf bands of triangular and honeycomb water-steel phononic crystals Hsiao, Fu-Li; Khelif, Abdelkrim; Moubchir, Hanane Journal of Applied Physics, Vol. 101, Issue 4 https://doi.org/10.1063/1.2472650	journal	February 2007
Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates Mohammadi, Saeed; Eftekhar, Ali Asghar; Khelif, Abdelkrim Applied Physics Letters, Vol. 92, Issue 22 https://doi.org/10.1063/1.2939097	journal	June 2008
Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators Goettler, Drew; Su, Mehmet; Leseman, Zayd Journal of Applied Physics, Vol. 108, Issue 8 https://doi.org/10.1063/1.3475987	journal	October 2010
Phononic crystals operating in the gigahertz range with extremely wide band gaps Soliman, Y. M.; Su, M. F.; Leseman, Z. C. Applied Physics Letters, Vol. 97, Issue 19 https://doi.org/10.1063/1.3504701	journal	November 2010
Focusing of the lowest antisymmetric Lamb wave in a gradient-index phononic crystal plate Wu, Tsung-Tsong; Chen, Yan-Ting; Sun, Jia-Hong Applied Physics Letters, Vol. 98, Issue 17 https://doi.org/10.1063/1.3583660	journal	April 2011
Large bandgaps of two-dimensional phononic crystals with cross-like holes Wang, Yan-Feng; Wang, Yue-Sheng; Su, Xiao-Xing Journal of Applied Physics, Vol. 110, Issue 11 https://doi.org/10.1063/1.3665205	journal	December 2011
Focusing guided waves using surface bonded elastic metamaterials Yan, Xiang; Zhu, Rui; Huang, Guoliang Applied Physics Letters, Vol. 103, Issue 12 https://doi.org/10.1063/1.4821258	journal	September 2013
The effect of stiffness and mass on coupled oscillations in a phononic crystal Baboly, M. Ghasemi; Su, M. F.; Reinke, C. M. AIP Advances, Vol. 3, Issue 11 https://doi.org/10.1063/1.4834335	journal	November 2013
Reducing symmetry in topology optimization of two-dimensional porous phononic crystals Dong, Hao-Wen; Wang, Yue-Sheng; Wang, Yan-Feng AIP Advances, Vol. 5, Issue 11 https://doi.org/10.1063/1.4936640	journal	November 2015
Ultra-high frequency, high Q/volume micromechanical resonators in a planar AlN phononic crystal Ghasemi Baboly, M.; Alaie, S.; Reinke, C. M. Journal of Applied Physics, Vol. 120, Issue 3 https://doi.org/10.1063/1.4958671	journal	July 2016
Demonstration of acoustic waveguiding and tight bending in phononic crystals Ghasemi Baboly, M.; Raza, A.; Brady, J. Applied Physics Letters, Vol. 109, Issue 18 https://doi.org/10.1063/1.4966463	journal	October 2016
Phonon-based scalable platform for chip-scale quantum computing Reinke, Charles M.; El-Kady, Ihab AIP Advances, Vol. 6, Issue 12 https://doi.org/10.1063/1.4972568	journal	December 2016
Acoustic beamwidth compressor using gradient-index phononic crystals Lin, Sz-Chin Steven; Tittmann, Bernhard R.; Sun, Jia-Hong Journal of Physics D: Applied Physics, Vol. 42, Issue 18 https://doi.org/10.1088/0022-3727/42/18/185502	journal	August 2009
Multi-objective optimization of two-dimensional porous phononic crystals Dong, Hao-Wen; Su, Xiao-Xing; Wang, Yue-Sheng Journal of Physics D: Applied Physics, Vol. 47, Issue 15 https://doi.org/10.1088/0022-3727/47/15/155301	journal	March 2014
Acousto-Optic Modulation and Optoacoustic Gating in Piezo-Optomechanical Circuits Balram, Krishna C.; Davanço, Marcelo I.; Ilic, B. Robert Physical Review Applied, Vol. 7, Issue 2 https://doi.org/10.1103/PhysRevApplied.7.024008	journal	February 2017
Acoustic band structure of periodic elastic composites Kushwaha, M. S.; Halevi, P.; Dobrzynski, L. Physical Review Letters, Vol. 71, Issue 13 https://doi.org/10.1103/PhysRevLett.71.2022	journal	September 1993
Evidence of acoustic wave focusing in a microscale 630 MHz Aluminum Nitride phononic crystal waveguide Kuo, Nai-Kuei; Piazza, Gianluca 2010 IEEE International Frequency Control Symposium (FCS) https://doi.org/10.1109/FREQ.2010.5556274	conference	June 2010
Enhancing Mechanical Quality Factors of Micro-Toroidal Optomechanical Resonators Using Phononic Crystals Alaie, Seyedhamidreza; Hossein-Zadeh, Mani; Ghasemi Baboly, Mohammadhosein Journal of Microelectromechanical Systems, Vol. 25, Issue 2 https://doi.org/10.1109/JMEMS.2015.2504332	journal	April 2016
Limits of quality factor in bulk-mode micromechanical resonators Chandorkar, S. A.; Agarwal, M.; Melamud, R. 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems https://doi.org/10.1109/MEMSYS.2008.4443596	conference	January 2008
Ultra high frequency phononic crystal in silicon carbide Kuo, N.; Gong, S.; Piazza, G. TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference https://doi.org/10.1109/TRANSDUCERS.2011.5969703	conference	June 2011
Investigation of full bandgaps in silicon phononic crystal membranes with tungsten and air inclusions Reinke, Charles M.; Su, Mehmet; Ziaei-Moayyed, Maryam 2010 IEEE Ultrasonics Symposium (IUS), 2010 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ULTSYM.2010.5935832	conference	October 2010
Dynamics of Phononic Materials and Structures: Historical Origins, Recent Progress, and Future Outlook Hussein, Mahmoud I.; Leamy, Michael J.; Ruzzene, Massimo Applied Mechanics Reviews, Vol. 66, Issue 4 https://doi.org/10.1115/1.4026911	journal	May 2014
Design of optomechanical cavities and waveguides on a simultaneous bandgap phononic-photonic crystal slab Safavi-Naeini, Amir H.; Painter, Oskar Optics Express, Vol. 18, Issue 14 https://doi.org/10.1364/OE.18.014926	journal	January 2010
Compact bends for multi-mode photonic crystal waveguides with high transmission and suppressed modal crosstalk Liu, Victor; Fan, Shanhui Optics Express, Vol. 21, Issue 7 https://doi.org/10.1364/OE.21.008069	journal	January 2013
A picogram and nanometer scale photonic crystal opto-mechanical cavity Eichenfield, M.; Camacho, R.; Chan, J. arXiv https://doi.org/10.48550/arxiv.0812.2953	text	January 2008
Design of Optomechanical Cavities and Waveguides on a Simultaneous Bandgap Phononic-Photonic Crystal Slab Safavi-Naeini, Amir H.; Painter, Oskar arXiv https://doi.org/10.48550/arxiv.1003.5265	text	January 2010

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