Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback

Jesse, Stephen; Hudak, Bethany M.; Zarkadoula, Eva; Song, Jiaming; Maksov, Artem B.; Fuentes-Cabrera, Miguel A.; Ganesh, Panchapakesan; Kravchenko, Ivan I.; Snijders, Panchapakesan C.; Lupini, Andrew R.; Borisevich, Albina Y.; Kalinin, Sergei V.

doi:10.1088/1361-6528/aabb79

Title: Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback

Journal Article · Wed Apr 04 00:00:00 EDT 2018 · Nanotechnology

DOI:https://doi.org/10.1088/1361-6528/aabb79· OSTI ID:1474611

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Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). The Institute for Functional Imaging of Materials and The Center for Nanophase Materials Sciences
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). The Institute for Functional Imaging of Materials and Materials Sciences and Technology Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Sciences and Technology Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). The Institute for Functional Imaging of Materials; Univ. of Tennessee, Knoxville, TN (United States). Bredesen Center for Interdisciplinary Research
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS) and Computational Sciences and Engineering Division
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS)

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Oak Ridge Leadership Computing Facility (OLCF)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1474611

Alternate ID(s):: OSTI ID: 1485002

Journal Information:: Nanotechnology, Vol. 29, Issue 25; ISSN 0957-4484

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 28 works

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Cited By (10)

Electron‐Beam Manipulation of Silicon Impurities in Single‐Walled Carbon Nanotubes Mustonen, Kimmo; Markevich, Alexander; Tripathi, Mukesh Advanced Functional Materials, Vol. 29, Issue 52 https://doi.org/10.1002/adfm.201901327	journal	June 2019
Atomic Mechanisms for the Si Atom Dynamics in Graphene: Chemical Transformations at the Edge and in the Bulk Ziatdinov, Maxim; Dyck, Ondrej; Jesse, Stephen Advanced Functional Materials, Vol. 29, Issue 52 https://doi.org/10.1002/adfm.201904480	journal	November 2019
The Atomic Circus: Small Electron Beams Spotlight Advanced Materials Down to the Atomic Scale Wu, Haijun; Zhao, Xiaoxu; Guan, Cao Advanced Materials, Vol. 30, Issue 47 https://doi.org/10.1002/adma.201802402	journal	October 2018
Manifold learning of four-dimensional scanning transmission electron microscopy Li, Xin; Dyck, Ondrej E.; Oxley, Mark P. npj Computational Materials, Vol. 5, Issue 1 https://doi.org/10.1038/s41524-018-0139-y	journal	January 2019
Deep learning analysis of defect and phase evolution during electron beam-induced transformations in WS2 Maksov, Artem; Dyck, Ondrej; Wang, Kai npj Computational Materials, Vol. 5, Issue 1 https://doi.org/10.1038/s41524-019-0152-9	journal	February 2019
Atom-by-atom fabrication with electron beams Dyck, Ondrej; Ziatdinov, Maxim; Lingerfelt, David B. Nature Reviews Materials, Vol. 4, Issue 7 https://doi.org/10.1038/s41578-019-0118-z	journal	June 2019
Influence of temperature on the displacement threshold energy in graphene Chirita Mihaila, Alexandru Ionut; Susi, Toma; Kotakoski, Jani Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-49565-4	journal	September 2019
Deep Learning Analysis of Defect and Phase Evolution During Electron Beam Induced Transformations in WS2 Maksov, Artem; Dyck, Ondrej; Wang, Kai arXiv https://doi.org/10.48550/arxiv.1803.05381	text	January 2018
Influence of temperature on the displacement threshold energy in graphene Mihaila, Alexandru I. Chirita; Susi, Toma; Kotakoski, Jani arXiv https://doi.org/10.48550/arxiv.1811.04011	text	January 2018
Atomic mechanisms for the Si atom dynamics in graphene: chemical transformations at the edge and in the bulk Ziatdinov, Maxim; Dyck, Ondrej; Jesse, Stephen arXiv https://doi.org/10.48550/arxiv.1901.09322	text	January 2019

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