Low dissipation spectral filtering using a field-effect tunable III–V hybrid metasurface

Sarma, Raktim; Campione, Salvatore; Goldflam, Michael; Shank, Joshua; Noh, Jinhyun; Smith, Sean; Ye, Peide D.; Sinclair, Michael; Klem, John; Wendt, Joel; Ruiz, Isaac; Howell, Stephen W.; Brener, Igal

doi:10.1063/1.5042662

Low dissipation spectral filtering using a field-effect tunable III–V hybrid metasurface

Journal Article · Mon Aug 06 00:00:00 EDT 2018 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.5042662· OSTI ID:1465384

Sarma, Raktim ^[1]; ^[1]; Goldflam, Michael ^[1]; Shank, Joshua ^[1]; Noh, Jinhyun ^[2]; Smith, Sean ^[1]; Ye, Peide D. ^[2]; Sinclair, Michael ^[1]; Klem, John ^[1]; Wendt, Joel ^[1]; Ruiz, Isaac ^[1]; Howell, Stephen W. ^[1]; ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Purdue Univ., West Lafayette, IN (United States)

Considering the power constrained scaling of silicon complementary metal-oxide-semiconductor technology, the use of high mobility III–V compound semiconductors such as In_0.53Ga_0.47As in conjunction with high-κ dielectrics is becoming a promising option for future n-type metal-oxide-semiconductor field-effect-transistors. Development of low dissipation field-effect tunable III–V based photonic devices integrated with high-κ dielectrics is therefore very appealing from a technological perspective. In this work, we present an experimental realization of a monolithically integrable, field-effect-tunable, III–V hybrid metasurface operating at long-wave-infrared spectral bands. Here, our device relies on strong light-matter coupling between epsilon-near-zero (ENZ) modes of an ultra-thin In_0.53Ga_0.47As layer and the dipole resonances of a complementary plasmonic metasurface.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1465384

Alternate ID(s):: OSTI ID: 1463755

Report Number(s):: SAND--2018-8724J; 666833

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 6 Vol. 113; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (35)

Ultrafast Electrically Tunable Polaritonic Metasurfaces Lee, Jongwon; Jung, Seungyong; Chen, Pai-Yen Advanced Optical Materials, Vol. 2, Issue 11 https://doi.org/10.1002/adom.201400185	journal	July 2014
Gate-Tunable Conducting Oxide Metasurfaces Huang, Yao-Wei; Lee, Ho Wai Howard; Sokhoyan, Ruzan Nano Letters, Vol. 16, Issue 9 https://doi.org/10.1021/acs.nanolett.6b00555	journal	August 2016
Dynamic Reflection Phase and Polarization Control in Metasurfaces Park, Junghyun; Kang, Ju-Hyung; Kim, Soo Jin Nano Letters, Vol. 17, Issue 1 https://doi.org/10.1021/acs.nanolett.6b04378	journal	December 2016
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene–Gold Reconfigurable Mid-Infrared Metasurfaces Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T. Nano Letters, Vol. 17, Issue 5 https://doi.org/10.1021/acs.nanolett.7b00359	journal	April 2017
Dynamic Beam Switching by Liquid Crystal Tunable Dielectric Metasurfaces Komar, Andrei; Paniagua-Domínguez, Ramón; Miroshnichenko, Andrey ACS Photonics, Vol. 5, Issue 5 https://doi.org/10.1021/acsphotonics.7b01343	journal	February 2018
Epsilon-Near-Zero Strong Coupling in Metamaterial-Semiconductor Hybrid Structures Jun, Young Chul; Reno, John; Ribaudo, Troy Nano Letters, Vol. 13, Issue 11 https://doi.org/10.1021/nl402939t	journal	October 2013
Electrical Modulation of Fano Resonance in Plasmonic Nanostructures Using Graphene Emani, Naresh K.; Chung, Ting-Fung; Kildishev, Alexander V. Nano Letters, Vol. 14, Issue 1 https://doi.org/10.1021/nl403253c	journal	December 2013
Electrically Tunable Metasurface Perfect Absorbers for Ultrathin Mid-Infrared Optical Modulators Yao, Yu; Shankar, Raji; Kats, Mikhail A. Nano Letters, Vol. 14, Issue 11 https://doi.org/10.1021/nl503104n	journal	October 2014
Control of Strong Light–Matter Coupling Using the Capacitance of Metamaterial Nanocavities Benz, Alexander; Campione, Salvatore; Klem, John F. Nano Letters, Vol. 15, Issue 3 https://doi.org/10.1021/nl504815c	journal	February 2015
Electrical Switching of Infrared Light Using Graphene Integration with Plasmonic Fano Resonant Metasurfaces Dabidian, Nima; Kholmanov, Iskandar; Khanikaev, Alexander B. ACS Photonics, Vol. 2, Issue 2 https://doi.org/10.1021/ph5003279	journal	January 2015
Graphene plasmonics for tunable terahertz metamaterials Ju, Long; Geng, Baisong; Horng, Jason Nature Nanotechnology, Vol. 6, Issue 10 https://doi.org/10.1038/nnano.2011.146	journal	September 2011
Ultrawide thermal free-carrier tuning of dielectric antennas coupled to epsilon-near-zero substrates Iyer, Prasad P.; Pendharkar, Mihir; Palmstrøm, Chris J. Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/s41467-017-00615-3	journal	September 2017
MEMS-tunable dielectric metasurface lens Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03155-6	journal	February 2018
Electrically Tunable Epsilon-Near-Zero (ENZ) Metafilm Absorbers Park, Junghyun; Kang, Ju-Hyung; Liu, Xiaoge Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep15754	journal	November 2015
Electrically tunable negative permeability metamaterials based on nematic liquid crystals Zhao, Qian; Kang, Lei; Du, Bo Applied Physics Letters, Vol. 90, Issue 1 https://doi.org/10.1063/1.2430485	journal	January 2007
Dynamic response of metamaterials in the terahertz regime: Blueshift tunability and broadband phase modulation Manceau, J. -M.; Shen, N. -H.; Kafesaki, M. Applied Physics Letters, Vol. 96, Issue 2 https://doi.org/10.1063/1.3292208	journal	January 2010
1-nm-capacitance-equivalent-thickness HfO ₂ /Al ₂ O ₃ /InGaAs metal-oxide-semiconductor structure with low interface trap density and low gate leakage current density Suzuki, R.; Taoka, N.; Yokoyama, M. Applied Physics Letters, Vol. 100, Issue 13 https://doi.org/10.1063/1.3698095	journal	March 2012
Tunable metamaterials based on voltage controlled strong coupling Benz, Alexander; Montaño, Inès; Klem, John F. Applied Physics Letters, Vol. 103, Issue 26 https://doi.org/10.1063/1.4859636	journal	December 2013
Electrically tunable all-dielectric optical metasurfaces based on liquid crystals Komar, Andrei; Fang, Zheng; Bohn, Justus Applied Physics Letters, Vol. 110, Issue 7 https://doi.org/10.1063/1.4976504	journal	February 2017
A tunable band-stop filter using a metamaterial structure and MEMS bridges on a silicon substrate Kundu, Avra; Das, Sonali; Maity, Santanu Journal of Micromechanics and Microengineering, Vol. 22, Issue 4 https://doi.org/10.1088/0960-1317/22/4/045004	journal	March 2012
Electrically tunable infrared metamaterials based on depletion-type semiconductor devices Jun, Young Chul; Brener, Igal Journal of Optics, Vol. 14, Issue 11 https://doi.org/10.1088/2040-8978/14/11/114013	journal	November 2012
Epsilon-Near-Zero Modes for Tailored Light-Matter Interaction Campione, Salvatore; Liu, Sheng; Benz, Alexander Physical Review Applied, Vol. 4, Issue 4 https://doi.org/10.1103/PhysRevApplied.4.044011	journal	October 2015
Theory of epsilon-near-zero modes in ultrathin films Campione, Salvatore; Brener, Igal; Marquier, Francois Physical Review B, Vol. 91, Issue 12, Article No. 121408(R) https://doi.org/10.1103/PhysRevB.91.121408	journal	March 2015
The Effect of (NH ₄ ) ₂ S Treatment on the Interface Characteristics of GaAs MIS Structures Fan, Jia-Fa; Oigawa, Haruhiro; Nannichi, Yasuo Japanese Journal of Applied Physics, Vol. 27, Issue Part 2, No. 7 https://doi.org/10.1143/JJAP.27.L1331	journal	July 1988
Frequency tunable near-infrared metamaterials based on VO₂ phase transition Dicken, Matthew J.; Aydin, Koray; Pryce, Imogen M. Optics Express, Vol. 17, Issue 20, p. 18330-18339 https://doi.org/10.1364/OE.17.018330	journal	January 2009
Berreman mode and epsilon near zero mode Vassant, Simon; Hugonin, Jean-Paul; Marquier, Francois Optics Express, Vol. 20, Issue 21, p. 23971-23977 https://doi.org/10.1364/OE.20.023971	journal	January 2012
Electro-optical switching by liquid-crystal controlled metasurfaces Decker, Manuel; Kremers, Christian; Minovich, Alexander Optics Express, Vol. 21, Issue 7 https://doi.org/10.1364/OE.21.008879	journal	January 2013
Monolithic metallic nanocavities for strong light-matter interaction to quantum-well intersubband excitations Benz, A.; Campione, S.; Liu, S. Optics Express, Vol. 21, Issue 26 https://doi.org/10.1364/OE.21.032572	journal	January 2013
Experimental verification of epsilon-near-zero plasmon polariton modes in degenerately doped semiconductor nanolayers Campione, Salvatore; Kim, Iltai; de Ceglia, Domenico Optics Express, Vol. 24, Issue 16 https://doi.org/10.1364/OE.24.018782	journal	January 2016
Spectral filtering using active metasurfaces compatible with narrow bandgap III-V infrared detectors Wolf, Omri; Campione, Salvatore; Kim, Jin Optics Express, Vol. 24, Issue 19 https://doi.org/10.1364/OE.24.021512	journal	January 2016
Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates Singh, Ranjan; Azad, Abul K.; Jia, Q. X. Optics Letters, Vol. 36, Issue 7 https://doi.org/10.1364/OL.36.001230	journal	January 2011
Electromechanically tunable metasurface transmission waveplate at terahertz frequencies Zhao, Xiaoguang; Schalch, Jacob; Zhang, Jingdi Optica, Vol. 5, Issue 3 https://doi.org/10.1364/OPTICA.5.000303	journal	January 2018
MEMS-tunable dielectric metasurface lens Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa CLEO: Science and Innovations, Conference on Lasers and Electro-Optics https://doi.org/10.1364/cleo_si.2018.sf1j.2	conference	January 2018
Thermal tunability in terahertz metamaterials fabricated on strontium titanate single crystal substrates Singh, Ranjan; Azad, Abul K.; Jia, Q. X. arXiv https://doi.org/10.48550/arxiv.1102.3507	text	January 2011
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene-Gold Reconfigurable Mid-Infrared Metasurfaces Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T. arXiv https://doi.org/10.48550/arxiv.1701.08221	text	January 2017

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Phase-only transmissive spatial light modulator based on tunable dielectric metasurface Li, Shi-Qiang; Xu, Xuewu; Maruthiyodan Veetil, Rasna Science, Vol. 364, Issue 6445 https://doi.org/10.1126/science.aaw6747	journal	June 2019
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Phase-only transmissive spatial light modulator based on tunable dielectric metasurface Li, Shi-Qiang; Xu, Xuewu; Veetil, Rasna Maruthiyodan arXiv https://doi.org/10.48550/arxiv.1901.07742	text	January 2019

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