High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings

Journal Article · Fri Jul 01 00:00:00 EDT 1994 · Optics and Spectroscopy

OSTI ID:146146

Vitushkin, L F; Zeilikovich, I S; Korotkov, V I ^[1]

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1. All-Russian Mendeleev Research Institute, St. Petersburg (Russian Federation); and others

An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.

• OSTI ID: 146146
• Journal Information: Optics and Spectroscopy, Journal Name: Optics and Spectroscopy Journal Issue: 1 Vol. 77; ISSN 0030-400X; ISSN OPSUA3
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
66 PHYSICS
DIFFRACTION
DIFFRACTOMETERS
GRATINGS
HOLOGRAPHY
MEASURING METHODS
OPTICAL SYSTEMS