High-precision measurements of the groove spacing of diffraction gratings using the interference diffractometer and study of the quality of diffraction gratings
Journal Article
·
· Optics and Spectroscopy
OSTI ID:146146
- All-Russian Mendeleev Research Institute, St. Petersburg (Russian Federation); and others
An interference-diffractometric method for measuring the groove spacing of diffraction gratings (periodical standards of small length) and a method for examining the quality of diffraction gratings are developed and investigated. They are based on the holographic method of controlling the sensitivity of the interference measurements using the repeat recording of holograms with compensation for the aberrations of the optical system. Measurements of the groove spacing (398 nm) of the holographic grating were performed with an error of 5 nm. 4 refs., 4 figs.
- OSTI ID:
- 146146
- Journal Information:
- Optics and Spectroscopy, Vol. 77, Issue 1; Other Information: PBD: Jul 1994; TN: Translated from Optika i Spektroskopiya; 77: No. 1, 145-151(1994)
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:146146