ALUMINUM NITRIDE PIEZOELECTRIC MICROPHONES AS ZERO-POWER PASSIVE ACOUSTIC FILTERS.
Conference
·
OSTI ID:1456450
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1456450
- Report Number(s):
- SAND2017-3608C; 652297
- Resource Relation:
- Conference: Proposed for presentation at the The 19th International Conference on Solid-State Sensors, Actuators and Microsystems held June 18-22, 2017 in Kaoshiung, Taiwan.
- Country of Publication:
- United States
- Language:
- English
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