More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy

Li, Kenan; Jacobsen, Chris

doi:10.1107/S1600577518007208

Title: More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy

Journal Article · Sun Jun 17 00:00:00 EDT 2018 · Journal of Synchrotron Radiation (Online)

DOI:https://doi.org/10.1107/S1600577518007208· OSTI ID:1454421

Li, Kenan ^[1];

^[2]

Northwestern Univ., Evanston, IL (United States); Argonne National Lab. (ANL), Argonne, IL (United States); SLAC National Accelerator Lab., Menlo Park, CA (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Northwestern Univ., Evanston, IL (United States)

Fresnel zone plates used for X-ray nanofocusing face high-aspect-ratio nanofabrication challenges in combining narrow transverse features (for high spatial resolution) along with extended optical modulation along the X-ray beam direction (to improve efficiency). The stacking of multiple Fresnel zone plates along the beam direction has already been shown to offer improved characteristics of resolution and efficiency when compared with thin single zone plates. Using multislice wave propagation simulation methods, here a number of new schemes for the stacking of multiple Fresnel zone plates are considered. These include consideration of optimal thickness and spacing in the axial direction, and methods to capture a fraction of the light otherwise diffracted into unwanted orders, and instead bring it into the desired first-order focus. In conclusion, the alignment tolerances for stacking multiple Fresnel zone plates are also considered.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1454421

Journal Information:: Journal of Synchrotron Radiation (Online), Vol. 25, Issue 4; ISSN 1600-5775

Publisher:: International Union of CrystallographyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 6 works

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X-ray Microscopy Jacobsen, Chris Cambridge University Press https://doi.org/10.1017/9781139924542	book	January 2019
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Title: More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy

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