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U.S. Department of Energy
Office of Scientific and Technical Information

A HIGH RESOLUTION WIRE SCANNER FOR MICRON SIZE PROFILE MEASUREMENTS AT THE SLC

Program Document ·
OSTI ID:1448594
Research Organization:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
AC02-76SF00515
OSTI ID:
1448594
Report Number(s):
SLAC-PUB-4605
Country of Publication:
United States
Language:
English

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