Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness

Berman, Diana; Guha, Supratik; Lee, Byeongdu; Elam, Jeffrey W.; Darling, Seth B.; Shevchenko, Elena V.

doi:10.1021/acsnano.6b08361

Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness

Journal Article · Tue Jan 31 00:00:00 EST 2017 · ACS Nano

DOI:https://doi.org/10.1021/acsnano.6b08361· OSTI ID:1439858

Berman, Diana ^[1]; Guha, Supratik ^[2]; ^[3]; Elam, Jeffrey W. ^[3]; Darling, Seth B. ^[2]; ^[3]

Univ. of North Texas, Denton, TX (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Univ. of Chicago, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States)

Control over refractive index and thickness of surface coatings is central to the design of low refraction films used in applications ranging from optical computing to antireflective coatings. Here, we introduce gas-phase sequential infiltration synthesis (SIS) as a robust, powerful and efficient approach to deposit conformal coatings with very low refractive indices. We demonstrate that the refractive indices of inorganic coatings can be efficiently tuned by the number of cycles used in the SIS process, composition and selective swelling of the of the polymer template. We show that the refractive index of Al₂O₃ can be lowered from 1.76 down to 1.1 using this method. The thickness of the Al₂O₃ coating can be efficiently controlled by the swelling of the block copolymer template in ethanol at elevated temperature, thereby enabling deposition of both single-layer and graded-index broadband anti-reflective coatings. Using this technique, Fresnel reflections of glass can be reduced to as low as 0.1% under normal illumination over a broad spectral range.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1439858

Alternate ID(s):: OSTI ID: 1419940

Journal Information:: ACS Nano, Journal Name: ACS Nano Journal Issue: 3 Vol. 11; ISSN 1936-0851

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Nano Spray‐Dried Block Copolymer Nanoparticles and Their Transformation into Hybrid and Inorganic Nanoparticles Weisbord, Inbal; Shomrat, Neta; Moshe, Hen Advanced Functional Materials, Vol. 30, Issue 18 https://doi.org/10.1002/adfm.201808932	journal	March 2019
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Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation Cianci, Elena; Nazzari, Daniele; Seguini, Gabriele Advanced Materials Interfaces, Vol. 5, Issue 20 https://doi.org/10.1002/admi.201801016	journal	August 2018
Homopolymer Nanolithography Tebbe, Moritz; Galati, Elizabeth; Walker, Gilbert C. Small, Vol. 13, Issue 37 https://doi.org/10.1002/smll.201702043	journal	July 2017
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong JOM, Vol. 71, Issue 1 https://doi.org/10.1007/s11837-018-3141-4	journal	September 2018
Properties and Applications of Vapor Infiltration into Polymeric Substrates Ingram, Wade F.; Jur, Jesse S. JOM, Vol. 71, Issue 1 https://doi.org/10.1007/s11837-018-3157-9	journal	October 2018
Mechanistic understanding of tungsten oxide in-plane nanostructure growth via sequential infiltration synthesis Kim, Jae Jin; Suh, Hyo Seon; Zhou, Chun Nanoscale, Vol. 10, Issue 7 https://doi.org/10.1039/c7nr07642h	journal	January 2018
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The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel The Journal of Chemical Physics, Vol. 151, Issue 19 https://doi.org/10.1063/1.5128108	journal	November 2019
Accessibility of the pores in highly porous alumina films synthesized via sequential infiltration synthesis She, Yunlong; Lee, Jihyung; Diroll, Benjamin T. Nanotechnology, Vol. 29, Issue 49 https://doi.org/10.1088/1361-6528/aae144	journal	October 2018
Vapor phase infiltration: from a bioinspired process to technologic application, a prospective review Azpitarte, Itxasne; Knez, Mato MRS Communications, Vol. 8, Issue 03 https://doi.org/10.1557/mrc.2018.126	journal	July 2018

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