On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer
Patent
·
OSTI ID:1433857
An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
- Research Organization:
- AMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (United States)
- Sponsoring Organization:
- USDOE
- Assignee:
- SAMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY (Pasadena, CA)
- Patent Number(s):
- 9,939,587
- Application Number:
- 15/249,608; DE-SC0001293
- OSTI ID:
- 1433857
- Country of Publication:
- United States
- Language:
- English
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