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On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

Patent ·
OSTI ID:1433857
An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
Research Organization:
AMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (United States)
Sponsoring Organization:
USDOE
Assignee:
SAMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR); CALIFORNIA INSTITUTE OF TECHNOLOGY (Pasadena, CA)
Patent Number(s):
9,939,587
Application Number:
15/249,608; DE-SC0001293
OSTI ID:
1433857
Country of Publication:
United States
Language:
English

References (15)

Flat dielectric grating reflectors with focusing abilities journal May 2010
High resolution on-chip optical filter array based on double subwavelength grating reflectors journal January 2015
Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography journal January 2012
Silicon nanophotonic devices for integrated sensing journal January 2009
S4 : A free electromagnetic solver for layered periodic structures journal October 2012
High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers journal October 2013
Sub-nm resolution cavity enhanced microspectrometer journal December 2009
Physics of near-wavelength high contrast gratings journal January 2012
Theoretical analysis of subwavelength high contrast grating reflectors journal January 2010
Broadband Mirrors in the Near-Infrared Based on Subwavelength Gratings in SOI journal October 2010
Concept of a high-resolution miniature spectrometer using an integrated filter array journal January 2007
High resolution on-chip spectroscopy based on miniaturized microdonut resonators journal January 2011
Ultrabroadband Mirror Using Low-Index Cladded Subwavelength Grating journal February 2004
A high-resolution spectrometer based on a compact planar two dimensional photonic crystal cavity array journal June 2012
Design of Fano Broadband Reflectors on SOI journal August 2010

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