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U.S. Department of Energy
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Three Dimensional Microlithography Final Report CRADA No. TC-0174-91

Technical Report ·
DOI:https://doi.org/10.2172/1430953· OSTI ID:1430953
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. microScape (formerly AEtek Corporation), Palo Alto, CA (United States)
The project is a relationship between the Lawrence Livermore National Laboratory (LLNL) and microScape (formerly AEtek Corporation).
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
OSTI ID:
1430953
Report Number(s):
LLNL-TR--747883; LLNL--99020618
Country of Publication:
United States
Language:
English

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