Growth of strontium ruthenate films by hybrid molecular beam epitaxy

Marshall, Patrick B.; Kim, Honggyu; Ahadi, Kaveh; Stemmer, Susanne

doi:10.1063/1.4998772

Title: Growth of strontium ruthenate films by hybrid molecular beam epitaxy

Journal Article · Fri Sep 01 00:00:00 EDT 2017 · APL Materials

DOI:https://doi.org/10.1063/1.4998772· OSTI ID:1429372

Marshall, Patrick B. ^[1]; Kim, Honggyu ^[1]; Ahadi, Kaveh ^[1]; Stemmer, Susanne ^[1]

Univ. of California, Santa Barbara, CA (United States). Materials Dept.

We report on the growth of epitaxial Sr₂RuO₄ films using a hybrid molecular beam epitaxy approach in which a volatile precursor containing RuO₄ is used to supply ruthenium and oxygen. The use of the precursor overcomes a number of issues encountered in traditional molecular beam epitaxy that uses elemental metal sources. Phase-pure, epitaxial thin films of Sr₂RuO₄ are obtained. At high substrate temperatures, growth proceeds in a layer-by-layer mode with intensity oscillations observed in reflection high-energy electron diffraction. Films are of high structural quality, as documented by x-ray diffraction, atomic force microscopy, and transmission electron microscopy. In conclusion, the method should be suitable for the growth of other complex oxides containing ruthenium, opening up opportunities to investigate thin films that host rich exotic ground states.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Univ. of California, Santa Barbara, CA (United States)

Sponsoring Organization:: USDOE; US Army Research Office (ARO); Defense Advanced Research Projects Agency (DARPA); Microelectronics Advanced Research Corporation (MARCO)

Grant/Contract Number:: FG02-02ER45994; W911NF-16-1-0361

OSTI ID:: 1429372

Alternate ID(s):: OSTI ID: 1380001

Journal Information:: APL Materials, Vol. 5, Issue 9; ISSN 2166-532X

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 11 works

Citation information provided by
Web of Science

References (30)

Refinement of the structure of Sr2RuO4 with 100 and 295 K X-ray data Walz, L.; Lichtenberg, F. Acta Crystallographica Section C Crystal Structure Communications, Vol. 49, Issue 7 https://doi.org/10.1107/s0108270192013143	journal	July 1993
Effects of oxygen on the sublimation of alkaline earths from effusion cells Hellman, E. S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 12, Issue 2 https://doi.org/10.1116/1.587036	journal	March 1994
Surface reconstructions in molecular beam epitaxy of SrTiO ₃ Kajdos, Adam P.; Stemmer, Susanne Applied Physics Letters, Vol. 105, Issue 19 https://doi.org/10.1063/1.4901726	journal	November 2014
Growth of Conductive SrRuO ₃ Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO ₂ Layers Han, Jeong Hwan; Lee, Woongkyu; Jeon, Woojin Chemistry of Materials, Vol. 24, Issue 24 https://doi.org/10.1021/cm302470k	journal	December 2012
Epitaxial growth and magnetic properties of the first five members of the layered Srn+1RunO3n+1 oxide series Tian, W.; Haeni, J. H.; Schlom, D. G. Applied Physics Letters, Vol. 90, Issue 2 https://doi.org/10.1063/1.2430941	journal	January 2007
Strong Increase of Tc of Sr2RuO4 Under Both Tensile and Compressive Strain Hicks, C. W.; Brodsky, D. O.; Yelland, E. A. Science, Vol. 344, Issue 6181 https://doi.org/10.1126/science.1248292	journal	April 2014
Growth window and effect of substrate symmetry in hybrid molecular beam epitaxy of a Mott insulating rare earth titanate Moetakef, Pouya; Zhang, Jack Y.; Raghavan, Santosh Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 4 https://doi.org/10.1116/1.4804180	journal	July 2013
In situ deposition of superconducting YBa ₂ Cu ₃ O ₇₋ _x and DyBa ₂ Cu ₃ O ₇₋ _x thin films by organometallic molecular‐beam epitaxy King, L. L. H.; Hsieh, K. Y.; Lichtenwalner, D. J. Applied Physics Letters, Vol. 59, Issue 23 https://doi.org/10.1063/1.105788	journal	December 1991
Electric field-tunable Ba _x Sr _{1− x} TiO ₃ films with high figures of merit grown by molecular beam epitaxy Mikheev, Evgeny; Kajdos, Adam P.; Hauser, Adam J. Applied Physics Letters, Vol. 101, Issue 25 https://doi.org/10.1063/1.4773034	journal	December 2012
Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach Jalan, Bharat; Engel-Herbert, Roman; Wright, Nicholas J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 3 https://doi.org/10.1116/1.3106610	journal	May 2009
Stoichiometry-driven metal-to-insulator transition in NdTiO ₃ /SrTiO ₃ heterostructures Xu, Peng; Phelan, Daniel; Seok Jeong, Jong Applied Physics Letters, Vol. 104, Issue 8 https://doi.org/10.1063/1.4866867	journal	February 2014
Enhanced localized superconductivity in Sr ₂ RuO ₄ thin film by pulsed laser deposition Cao, J.; Massarotti, D.; Vickers, M. E. Superconductor Science and Technology, Vol. 29, Issue 9 https://doi.org/10.1088/0953-2048/29/9/095005	journal	July 2016
Extremely Strong Dependence of Superconductivity on Disorder in ${Sr}_{2} {RuO}_{4}$ Mackenzie, A. P.; Haselwimmer, R. K. W.; Tyler, A. W. Physical Review Letters, Vol. 80, Issue 1 https://doi.org/10.1103/physrevlett.80.161	journal	January 1998
A new RuO4 solvent solution for pure ruthenium film depositions Gatineau, Julien; Yanagita, Kazutaka; Dussarrat, Christian Microelectronic Engineering, Vol. 83, Issue 11-12 https://doi.org/10.1016/j.mee.2006.10.013	journal	November 2006
Epitaxial SrTiO₃ films with electron mobilities exceeding 30,000 cm² V^-1 s^-1 Son, Junwoo; Moetakef, Pouya; Jalan, Bharat Nature Materials, Vol. 9, Issue 6, p. 482-484 https://doi.org/10.1038/nmat2750	journal	April 2010
Superconductivity in a layered perovskite without copper Maeno, Y.; Hashimoto, H.; Yoshida, K. Nature, Vol. 372, Issue 6506 https://doi.org/10.1038/372532a0	journal	December 1994
Strain Control of Fermiology and Many-Body Interactions in Two-Dimensional Ruthenates Burganov, B.; Adamo, C.; Mulder, A. Physical Review Letters, Vol. 116, Issue 19 https://doi.org/10.1103/physrevlett.116.197003	journal	May 2016
Odd-Parity Superconductivity in Sr2RuO4 Nelson, K. D. Science, Vol. 306, Issue 5699 https://doi.org/10.1126/science.1103881	journal	November 2004
Vapor pressures of ruthenium and osmium Carrera, N. J.; Walker, R. F.; Plante, E. R. Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry, Vol. 68A, Issue 3 https://doi.org/10.6028/jres.068a.031	journal	May 1964
Perspective: Oxide molecular-beam epitaxy rocks! Schlom, Darrell G. APL Materials, Vol. 3, Issue 6 https://doi.org/10.1063/1.4919763	journal	June 2015
Growth of superconducting Sr2RuO4 thin films Krockenberger, Y.; Uchida, M.; Takahashi, K. S. Applied Physics Letters, Vol. 97, Issue 8 https://doi.org/10.1063/1.3481363	journal	August 2010
Ein Beitrag �ber Sr2RuO4 und Sr3Ru2O7 Zur Oktaederstreckung von M4+ in K2NiF4- und Sr3Ti2O7-Typ-Verbindungen M�ller-Buschbaum, Hk.; Wilkens, J. Zeitschrift f�r anorganische und allgemeine Chemie, Vol. 591, Issue 1 https://doi.org/10.1002/zaac.19905910118	journal	December 1990
Growth of RuO ₂ Thin Films by Pulsed-Chemical Vapor Deposition Using RuO ₄ Precursor and 5% H ₂ Reduction Gas Han, Jeong Hwan; Lee, Sang Woon; Kim, Seong Keun Chemistry of Materials, Vol. 22, Issue 20 https://doi.org/10.1021/cm101694g	journal	October 2010
Epitaxial Thin-Film Growth of SrRuO ₃ , Sr ₃ Ru ₂ O ₇ , and Sr ₂ RuO ₄ from a SrRuO ₃ Target by Pulsed Laser Deposition Ohnishi, Tsuyoshi; Takada, Kazunori Applied Physics Express, Vol. 4, Issue 2 https://doi.org/10.1143/apex.4.025501	journal	January 2011
The role of MBE in recent quantum Hall effect physics discoveries Pfeiffer, Loren; West, K. W. Physica E: Low-dimensional Systems and Nanostructures, Vol. 20, Issue 1-2 https://doi.org/10.1016/j.physe.2003.09.035	journal	December 2003
Structure and spectroscopic properties of (AA′)(BB′)O ₃ mixed-perovskite crystals Pawlak, Dorota A.; Ito, Masahiko; Dobrzycki, Lukasz Journal of Materials Research, Vol. 20, Issue 12 https://doi.org/10.1557/jmr.2005.0412	journal	December 2005
Sub-unit cell layer-by-layer growth of Fe3O4, MgO, and Sr2RuO4 thin films Reisinger, D.; Blass, B.; Klein, J. Applied Physics A, Vol. 77, Issue 5 https://doi.org/10.1007/s00339-003-2105-9	journal	October 2003
Highly Conductive SrVO ₃ as a Bottom Electrode for Functional Perovskite Oxides Moyer, Jarrett A.; Eaton, Craig; Engel-Herbert, Roman Advanced Materials, Vol. 25, Issue 26 https://doi.org/10.1002/adma.201300900	journal	May 2013
Two-dimensional electron gas in a modulation-doped SrTiO ₃ /Sr(Ti, Zr)O ₃ heterostructure Kajdos, Adam P.; Ouellette, Daniel G.; Cain, Tyler A. Applied Physics Letters, Vol. 103, Issue 8 https://doi.org/10.1063/1.4819203	journal	August 2013
Formation of a Nematic Fluid at High Fields in Sr3Ru2O7 Borzi, R. A.; Grigera, S. A.; Farrell, J. Science, Vol. 315, Issue 5809 https://doi.org/10.1126/science.1134796	journal	January 2007

Cited By (4)

Scaling growth rates for perovskite oxide virtual substrates on silicon Lapano, Jason; Brahlek, Matthew; Zhang, Lei Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-10273-2	journal	June 2019
Pair suppression caused by mosaic-twist defects in superconducting Sr2RuO4 thin-films prepared using pulsed laser deposition Garcia, Carla Maria Palomares; Di Bernardo, Angelo; Kimbell, Graham Communications Materials, Vol. 1, Issue 1 https://doi.org/10.1038/s43246-020-0026-1	journal	May 2020
Synthesis science of SrRuO ₃ and CaRuO ₃ epitaxial films with high residual resistivity ratios Nair, Hari P.; Liu, Yang; Ruf, Jacob P. APL Materials, Vol. 6, Issue 4 https://doi.org/10.1063/1.5023477	journal	April 2018
Electronic and vibrational signatures of ruthenium vacancies in ${Sr}_{2} {RuO}_{4}$ thin films Kim, Gideok; Suyolcu, Y. Eren; Herrero-Martin, J. Physical Review Materials, Vol. 3, Issue 9 https://doi.org/10.1103/physrevmaterials.3.094802	journal	September 2019

Figures / Tables (4)

Similar Records

Epitaxial growth and magnetic properties of the first five members of the layered Sr{sub n+1}Ru{sub n}O{sub 3n+1} oxide series

Journal Article · Mon Jan 08 00:00:00 EST 2007 · Applied Physics Letters · OSTI ID:1429372

Tian, W; Haeni, J H; Schlom, D G; +7 more

Growth of SrVO{sub 3} thin films by hybrid molecular beam epitaxy

Journal Article · Sun Nov 15 00:00:00 EST 2015 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:1429372

Eaton, Craig; Brahlek, Matthew; Engel-Herbert, Roman; +4 more

Phase characterization of dysprosium barium copper oxide thin films grown on strontium titanate by molecular beam epitaxy

Journal Article · Mon May 01 00:00:00 EDT 1989 · J. Mat. Res.; (United States) · OSTI ID:1429372

Hellman, E S; Schlom, D G; Marshall, A F; +7 more

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
materials
metals
microscopy
diffraction optics
metallurgy
solid state chemistry
atomic force microscopy
light diffraction
chemical analysis
transition metals