Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

Beechem, Thomas; Graham, Samuel; Kearney, Sean P.; Phinney, Leslie M.; Serrano, Justin R.

doi:10.1063/1.2738946

Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

Journal Article · Fri Jun 01 00:00:00 EDT 2007 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2738946· OSTI ID:1426987

Beechem, Thomas; Graham, Samuel; Kearney, Sean P.; Phinney, Leslie M.; Serrano, Justin R.

Abstract not provided.

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1426987

Report Number(s):: SAND2007-0693J; 524118

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 78; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

References (19)

Anharmonic effects in light scattering due to optical phonons in silicon Balkanski, M.; Wallis, R. F.; Haro, E. Physical Review B, Vol. 28, Issue 4 https://doi.org/10.1103/PhysRevB.28.1928	journal	August 1983
A lattice theory of morphic effects in crystals of the diamond structure Ganesan, S.; Maradudin, A. A.; Oitmaa, J. Annals of Physics, Vol. 56, Issue 2 https://doi.org/10.1016/0003-4916(70)90029-1	journal	February 1970
Temperature dependence of silicon Raman lines Tsu, Raphael; Hernandez, Jesus Gonzalez Applied Physics Letters, Vol. 41, Issue 11 https://doi.org/10.1063/1.93394	journal	December 1982
Kapitza conductance and heat flow between solids at temperatures from 50 to 300 K Stoner, R. J.; Maris, H. J. Physical Review B, Vol. 48, Issue 22 https://doi.org/10.1103/PhysRevB.48.16373	journal	December 1993
Spatially resolved Raman spectroscopy evaluation of residual stresses in 3C-SiC layer deposited on Si substrates with different crystallographic orientations Zhu, W. L.; Zhu, J. L.; Nishino, S. Applied Surface Science, Vol. 252, Issue 6 https://doi.org/10.1016/j.apsusc.2005.04.020	journal	January 2006
Coherent Raman measurements of polymer thin‐film pressure and temperature during picosecond laser ablation Hare, David E.; Franken, Jens; Dlott, Dana D. Journal of Applied Physics, Vol. 77, Issue 11 https://doi.org/10.1063/1.359177	journal	June 1995
Crystal size and temperature measurements in nanostructured silicon using Raman spectroscopy Viera, G.; Huet, S.; Boufendi, L. Journal of Applied Physics, Vol. 90, Issue 8 https://doi.org/10.1063/1.1398601	journal	October 2001
Thermal mapping of defects in AlGaN∕GaN heterostructure field-effect transistors using micro-Raman spectroscopy Pomeroy, J. W.; Kuball, M.; Wallis, D. J. Applied Physics Letters, Vol. 87, Issue 10 https://doi.org/10.1063/1.2041823	journal	September 2005
Phonon lifetimes and phonon decay in InN Pomeroy, J. W.; Kuball, M.; Lu, H. Applied Physics Letters, Vol. 86, Issue 22 https://doi.org/10.1063/1.1940124	journal	May 2005
Effect of pressure and temperature on Raman spectra of solids: anharmonicity Lucazeau, Guy Journal of Raman Spectroscopy, Vol. 34, Issue 7-8 https://doi.org/10.1002/jrs.1027	journal	January 2003
Raman Thermometry of Polysilicon Microelectro-mechanical Systems in the Presence of an Evolving Stress Abel, Mark R.; Graham, Samuel; Serrano, Justin R. Journal of Heat Transfer, Vol. 129, Issue 3 https://doi.org/10.1115/1.2409996	journal	May 2006
Ultrahigh time-resolution vibrational spectroscopy of shocked molecular solids Hambir, Selezion A.; Franken, Jens; Hare, David E. Journal of Applied Physics, Vol. 81, Issue 5 https://doi.org/10.1063/1.364269	journal	March 1997
Stress characterization of MEMS microbridges by micro-Raman spectroscopy Starman, L. A.; Lott, J. A.; Amer, M. S. Sensors and Actuators A: Physical, Vol. 104, Issue 2 https://doi.org/10.1016/S0924-4247(02)00432-6	journal	April 2003
The investigation of microsystems using Raman spectroscopy De Wolf, Ingrid; Jian, Chen; van Spengen, W. Merlijn Optics and Lasers in Engineering, Vol. 36, Issue 2 https://doi.org/10.1016/S0143-8166(01)00033-1	journal	August 2001
Micro-Raman measurement of bending stresses in micromachined silicon flexures Srikar, V. T.; Swan, A. K.; Unlu, M. S. Journal of Microelectromechanical Systems, Vol. 12, Issue 6 https://doi.org/10.1109/JMEMS.2003.820280	journal	December 2003
Nanoscale thermal transport Cahill, David G.; Ford, Wayne K.; Goodson, Kenneth E. Journal of Applied Physics, Vol. 93, Issue 2, p. 793-818 https://doi.org/10.1063/1.1524305	journal	January 2003
Mechanical property measurement of InP-based MEMS for optical communications Pruessner, Marcel W.; King, Todd T.; Kelly, Daniel P. Sensors and Actuators A: Physical, Vol. 105, Issue 2 https://doi.org/10.1016/S0924-4247(03)00102-X	journal	July 2003
Thermal imaging of electronic devices with low surface emissivity Webb, P. W. IEE Proceedings G Circuits, Devices and Systems, Vol. 138, Issue 3 https://doi.org/10.1049/ip-g-2.1991.0065	journal	January 1991
Temperature Dependence of Raman Scattering in Silicon Hart, T. R.; Aggarwal, R. L.; Lax, Benjamin Physical Review B, Vol. 1, Issue 2 https://doi.org/10.1103/PhysRevB.1.638	journal	January 1970

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Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy

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