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Methods for improving the damage performance of fused silica polished by magnetorheological finishing

Journal Article · · Proceedings of SPIE - The International Society for Optical Engineering
DOI:https://doi.org/10.1117/12.2281479· OSTI ID:1426482
 [1];  [2];  [2];  [3];  [3];  [2];  [2]
  1. Univ. of Rochester, NY (United States). Lab. for Laser Energetics; Laboratory for Laser Energetics, University of Rochester
  2. Univ. of Rochester, NY (United States). Lab. for Laser Energetics
  3. QED Technologies, Rochester, NY (United States)
+ Show Author Affiliations

The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian pulses. Lastly, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3, while maintaining <1-nm surface roughness.

Research Organization:
Univ. of Rochester, NY (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0001944
OSTI ID:
1426482
Report Number(s):
2017--97; 13--81; 2017-97, 1381, 2338
Journal Information:
Proceedings of SPIE - The International Society for Optical Engineering, Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Vol. 10447; ISSN 0277-786X
Publisher:
SPIECopyright Statement
Country of Publication:
United States
Language:
English

References (1)

Effects of deep wet etching in HF/HNO_3 and KOH solutions on the laser damage resistance and surface quality of fused silica optics at 351 nm journal January 2017

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Related Subjects

36 MATERIALS SCIENCE
Laser-induced damage
magnetorheological finishing