Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Andersen, Tassie K.; Cook, Seyoung; Benda, Erika; Hong, Hawoong; Marks, Laurence D.; Fong, Dillon D.

doi:10.1063/1.5008369

Title: Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Journal Article · Thu Mar 08 00:00:00 EST 2018 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.5008369· OSTI ID:1425212

Andersen, Tassie K. ^[1]; Cook, Seyoung ^[1];

^[2]; Hong, Hawoong ^[2]; Marks, Laurence D. ^[3]; Fong, Dillon D. ^[4]

Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division

A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. In conclusion, the high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO₃ oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Bettis Atomic Power Lab. (BAPL), West Mifflin, PA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; USDOE

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1425212

Alternate ID(s):: OSTI ID: 1424823

Journal Information:: Review of Scientific Instruments, Vol. 89, Issue 3; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 6 works

Citation information provided by
Web of Science

References (42)

In situ synchrotron x-ray studies of strain and composition evolution during metal-organic chemical vapor deposition of InGaN Richard, M. -I.; Highland, M. J.; Fister, T. T. Applied Physics Letters, Vol. 96, Issue 5 https://doi.org/10.1063/1.3293441	journal	February 2010
Effects of oxygen on the sublimation of alkaline earths from effusion cells Hellman, E. S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 12, Issue 2 https://doi.org/10.1116/1.587036	journal	March 1994
Kinetics of Low-Pressure Chemical Vapor Deposition of TiO[sub 2] from Titanium Tetraisopropoxide Siefering, K. L. Journal of The Electrochemical Society, Vol. 137, Issue 3 https://doi.org/10.1149/1.2086561	journal	January 1990
Complex oxide growth using simultaneous in situ reflection high-energy electron diffraction and x-ray reflectivity: When is one layer complete? Sullivan, M. C.; Ward, M. J.; Gutiérrez-Llorente, Araceli Applied Physics Letters, Vol. 106, Issue 3 https://doi.org/10.1063/1.4906419	journal	January 2015
Frontiers in the Growth of Complex Oxide Thin Films: Past, Present, and Future of Hybrid MBE Brahlek, Matthew; Gupta, Arnab Sen; Lapano, Jason Advanced Functional Materials, Vol. 28, Issue 9 https://doi.org/10.1002/adfm.201702772	journal	December 2017
Lowering the Temperature of Solid Oxide Fuel Cells Wachsman, E. D.; Lee, K. T. Science, Vol. 334, Issue 6058 https://doi.org/10.1126/science.1204090	journal	November 2011
Evolution of Crystal Structure During the Initial Stages of ZnO Atomic Layer Deposition Boichot, R.; Tian, L.; Richard, M. -I. Chemistry of Materials, Vol. 28, Issue 2 https://doi.org/10.1021/acs.chemmater.5b04223	journal	January 2016
Epitaxial growth of high-temperature superconducting thin films Eckstein, J. N. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 2 https://doi.org/10.1116/1.584741	journal	March 1989
In situ surface/interface x-ray diffractometer for oxide molecular beam epitaxy Lee, J. H.; Tung, I. C.; Chang, S. -H. Review of Scientific Instruments, Vol. 87, Issue 1 https://doi.org/10.1063/1.4939100	journal	January 2016
Sr flux stability against oxidation in oxide-molecular-beam-epitaxy environment: Flux, geometry, and pressure dependence Kim, Y. S.; Bansal, Namrata; Chaparro, Carlos Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 28, Issue 2 https://doi.org/10.1116/1.3298880	journal	March 2010
Reaction Mechanism Studies on Titanium Isopropoxide–Water Atomic Layer Deposition Process Rahtu, A.; Ritala, M. Chemical Vapor Deposition, Vol. 8, Issue 1 https://doi.org/10.1002/1521-3862(20020116)8:1<21::AID-CVDE21>3.0.CO;2-0	journal	January 2002
In situ x-ray scattering study of PbTiO3 chemical-vapor deposition Murty, M. V. Ramana; Streiffer, S. K.; Stephenson, G. B. Applied Physics Letters, Vol. 80, Issue 10 https://doi.org/10.1063/1.1458530	journal	March 2002
Highly sensitive and selective gas sensors using p-type oxide semiconductors: Overview Kim, Hyo-Joong; Lee, Jong-Heun Sensors and Actuators B: Chemical, Vol. 192 https://doi.org/10.1016/j.snb.2013.11.005	journal	March 2014
Accessing a growth window for SrVO3 thin films Brahlek, Matthew; Zhang, Lei; Eaton, Craig Applied Physics Letters, Vol. 107, Issue 14 https://doi.org/10.1063/1.4932198	journal	October 2015
Waterless TiO ₂ atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide Anderson, Virginia R.; Cavanagh, Andrew S.; Abdulagatov, Aziz I. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1 https://doi.org/10.1116/1.4839015	journal	January 2014
Molecular beam epitaxy of SrTiO3 with a growth window Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne Applied Physics Letters, Vol. 95, Issue 3 https://doi.org/10.1063/1.3184767	journal	July 2009
In situ X-ray studies of metal organic chemical vapor deposition of PbZrxTi1−xO3 Wang, R. -V.; Jiang, F.; Fong, D. D. Thin Solid Films, Vol. 515, Issue 14 https://doi.org/10.1016/j.tsf.2006.12.019	journal	May 2007
Anomalous Interface and Surface Strontium Segregation in (La _{1– y} Sr _y ) ₂ CoO _4±δ /La _{1– x} Sr _x CoO _3−δ Heterostructured Thin Films Feng, Zhenxing; Yacoby, Yizhak; Gadre, Milind J. The Journal of Physical Chemistry Letters, Vol. 5, Issue 6 https://doi.org/10.1021/jz500293d	journal	March 2014
A review of CBE, MOMBE and GSMBE Tsang, W. T. Journal of Crystal Growth, Vol. 111, Issue 1-4 https://doi.org/10.1016/0022-0248(91)91034-8	journal	May 1991
Wafer-scale growth of VO2 thin films using a combinatorial approach Zhang, Hai-Tian; Zhang, Lei; Mukherjee, Debangshu Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms9475	journal	October 2015
Self-regulated growth of LaVO3 thin films by hybrid molecular beam epitaxy Zhang, Hai-Tian; Dedon, Liv R.; Martin, Lane W. Applied Physics Letters, Vol. 106, Issue 23 https://doi.org/10.1063/1.4922213	journal	June 2015
Stoichiometry optimization of homoepitaxial oxide thin films using x-ray diffraction LeBeau, James M.; Engel-Herbert, Roman; Jalan, Bharat Applied Physics Letters, Vol. 95, Issue 14 https://doi.org/10.1063/1.3243696	journal	October 2009
A review of electrode materials for electrochemical supercapacitors Wang, Guoping; Zhang, Lei; Zhang, Jiujun Chemical Society Reviews, Vol. 41, Issue 2, p. 797-828 https://doi.org/10.1039/c1cs15060j	journal	January 2012
Metalorganic CVD of GaAs in a molecular beam system Veuhoff, E.; Pletschen, W.; Balk, P. Journal of Crystal Growth, Vol. 55, Issue 1 https://doi.org/10.1016/0022-0248(81)90267-0	journal	October 1981
Real-Time X-Ray Scattering Studies of Surface Structure During Metalorganic Chemical Vapor Deposition of GaN Stephenson, G. Brian; Eastman, Jeffrey A.; Auciello, Orlando MRS Bulletin, Vol. 24, Issue 1 https://doi.org/10.1557/s088376940005168x	journal	January 1999
High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography Hruszkewycz, S. O.; Allain, M.; Holt, M. V. Nature Materials, Vol. 16, Issue 2 https://doi.org/10.1038/nmat4798	journal	November 2016
In situ synchrotron x-ray characterization of ZnO atomic layer deposition Fong, D. D.; Eastman, J. A.; Kim, S. K. Applied Physics Letters, Vol. 97, Issue 19 https://doi.org/10.1063/1.3514254	journal	November 2010
Growth modes in metal-organic molecular beam epitaxy of TiO2 on r-plane sapphire Jalan, Bharat; Engel-Herbert, Roman; Cagnon, Joël Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 2 https://doi.org/10.1116/1.3065713	journal	March 2009
Surface Sensitive X-Ray Scattering Fuoss, P. Annual Review of Materials Research, Vol. 20, Issue 1 https://doi.org/10.1146/annurev.matsci.20.1.365	journal	January 1990
Perovskite oxides for visible-light-absorbing ferroelectric and photovoltaic materials Grinberg, Ilya; West, D. Vincent; Torres, Maria Nature, Vol. 503, Issue 7477, p. 509-512 https://doi.org/10.1038/nature12622	journal	November 2013
Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction Eres, G.; Tischler, J. Z.; Yoon, M. Applied Physics Letters, Vol. 80, Issue 18 https://doi.org/10.1063/1.1477279	journal	May 2002
Molecular Beam Epitaxy of GaAs and InP with Gas Sources for As and P Panish, M. B. Journal of The Electrochemical Society, Vol. 127, Issue 12 https://doi.org/10.1149/1.2129580	journal	January 1980
Improved air stability of perovskite solar cells via solution-processed metal oxide transport layers You, Jingbi; Meng, Lei; Song, Tze-Bin Nature Nanotechnology, Vol. 11, Issue 1 https://doi.org/10.1038/nnano.2015.230	journal	October 2015
Dynamic Fluctuations and Static Speckle in Critical X-Ray Scattering from ${SrTiO}_{3}$ Holt, M.; Sutton, M.; Zschack, P. Physical Review Letters, Vol. 98, Issue 6 https://doi.org/10.1103/physrevlett.98.065501	journal	February 2007
I n s i t u formation of superconducting YBa ₂ Cu ₃ O ₇ ₋ _x thin films using pure ozone vapor oxidation Berkley, D. D.; Johnson, B. R.; Anand, N. Applied Physics Letters, Vol. 53, Issue 20 https://doi.org/10.1063/1.100489	journal	November 1988
A Perovskite Oxide Optimized for Oxygen Evolution Catalysis from Molecular Orbital Principles Suntivich, J.; May, K. J.; Gasteiger, H. A. Science, Vol. 334, Issue 6061 https://doi.org/10.1126/science.1212858	journal	October 2011
A six-circle diffractometer system for synchrotron X-ray studies of surfaces and thin film growth by molecular beam epitaxy Hong, Hawoong; Chiang, T. -C. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 572, Issue 2 https://doi.org/10.1016/j.nima.2006.11.056	journal	March 2007
Molecular beam epitaxial growth of GaAs using trimethylgallium as a Ga source Tokumitsu, Eisuke; Kudou, Yoshimitsu; Konagai, Makoto Journal of Applied Physics, Vol. 55, Issue 8 https://doi.org/10.1063/1.333344	journal	April 1984
Catalysis by layered materials: A review Centi, Gabriele; Perathoner, Siglinda Microporous and Mesoporous Materials, Vol. 107, Issue 1-2 https://doi.org/10.1016/j.micromeso.2007.03.011	journal	January 2008
Erbium–Silicon–Oxide crystalline films prepared by MOMBE Masaki, K.; Isshiki, H.; Kimura, T. Optical Materials, Vol. 27, Issue 5 https://doi.org/10.1016/j.optmat.2004.08.027	journal	February 2005
Cathode materials for solid oxide fuel cells: a review Sun, Chunwen; Hui, Rob; Roller, Justin Journal of Solid State Electrochemistry, Vol. 14, Issue 7 https://doi.org/10.1007/s10008-009-0932-0	journal	October 2009
Spontaneous Oscillations and Waves during Chemical Vapor Deposition of InN Jiang, F.; Munkholm, A.; Wang, R. -V. Physical Review Letters, Vol. 101, Issue 8 https://doi.org/10.1103/physrevlett.101.086102	journal	August 2008

Cited By (1)

Experimental setup combining in situ hard X-ray photoelectron spectroscopy and real-time surface X-ray diffraction for characterizing atomic and electronic structure evolution during complex oxide heterostructure growth Eres, Gyula; Rouleau, C. M.; Lu, Q. Review of Scientific Instruments, Vol. 90, Issue 9 https://doi.org/10.1063/1.5116135	journal	September 2019