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U.S. Department of Energy
Office of Scientific and Technical Information

Methods and systems for micro machines

Patent ·
OSTI ID:1424393

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
MicroZeus, LLC (Dallas, TX)
Patent Number(s):
9,912,257
Application Number:
14/512,176
OSTI ID:
1424393
Country of Publication:
United States
Language:
English

References (5)

Digital Light Processing for high-brightness high-resolution applications conference May 1997
Effects of operating conditions on DMD hinge memory lifetime conference January 2003
DMD reliability: a MEMS success story conference January 2003
Digital Micromirror Device (DMD) hinge memory lifetime reliability modeling conference January 2002
Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD) conference January 1998

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