Ion implantation for deterministic single atom devices

Pacheco, J. L.; Singh, M.; Perry, D. L.; Wendt, J. R.; Ten Eyck, G.; Manginell, R. P.; Pluym, T.; Luhman, D. R.; Lilly, M. P.; Carroll, M. S.; Bielejec, E.

doi:10.1063/1.5001520

Ion implantation for deterministic single atom devices

Journal Article · Sun Dec 03 23:00:00 EST 2017 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.5001520· OSTI ID:1411229

^[1]; Singh, M. ^[1]; Perry, D. L. ^[1]; Wendt, J. R. ^[1]; Ten Eyck, G. ^[1]; ^[1]; Pluym, T. ^[1]; Luhman, D. R. ^[1]; Lilly, M. P. ^[1]; Carroll, M. S. ^[1]; Bielejec, E. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Here, we demonstrate a capability of deterministic doping at the single atom level using a combination of direct write focused ion beam and solid-state ion detectors. The focused ion beam system can position a single ion to within 35 nm of a targeted location and the detection system is sensitive to single low energy heavy ions. This platform can be used to deterministically fabricate single atom devices in materials where the nanostructure and ion detectors can be integrated, including donor-based qubits in Si and color centers in diamond.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1411229

Report Number(s):: SAND--2017-11983J; 658452

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 12 Vol. 88; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Detection of small bunches of ions using image charges Räcke, Paul; Spemann, Daniel; Gerlach, Jürgen W. London : Nature Publishing Group https://doi.org/10.34657/10606	text	January 2018
Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation Eaton, Shane M.; Hadden, John P.; Bharadwaj, Vibhav Advanced Quantum Technologies, Vol. 2, Issue 5-6 https://doi.org/10.1002/qute.201900006	journal	April 2019
Coherent control and high-fidelity readout of chromium ions in commercial silicon carbide Diler, Berk; Whiteley, Samuel J.; Anderson, Christopher P. npj Quantum Information, Vol. 6, Issue 1 https://doi.org/10.1038/s41534-020-0247-7	journal	January 2020
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Topological Quantum Optics Using Atomlike Emitter Arrays Coupled to Photonic Crystals Perczel, J.; Borregaard, J.; Chang, D. E. Physical Review Letters, Vol. 124, Issue 8 https://doi.org/10.1103/physrevlett.124.083603	journal	February 2020
Fabrication of highly dense arrays of nanocrystalline diamond nanopillars with integrated silicon-vacancy color centers during the growth Schmidt, Alexander; Naydenov, Boris; Jelezko, Fedor Optical Materials Express, Vol. 9, Issue 12 https://doi.org/10.1364/ome.9.004545	journal	January 2019
Quantum defects by design Bassett, Lee C.; Alkauskas, Audrius; Exarhos, Annemarie L. Nanophotonics, Vol. 8, Issue 11 https://doi.org/10.1515/nanoph-2019-0211	journal	October 2019
Fabrication of highly dense arrays of nanocrystalline diamond nanopillars with integrated silicon-vacancy color centers during the growth Schmidt, Alexander; Naydenov, Boris; Jelezko, Fedor Universität Kassel https://doi.org/10.17170/kobra-20191114782	text	January 2019
Topological quantum optics using atom-like emitter arrays coupled to photonic crystals Perczel, Janos; Borregaard, Johannes; Chang, Darrick E. arXiv https://doi.org/10.48550/arxiv.1810.12299	text	January 2018
Quantum Nanophotonics with Group IV defects in Diamond Bradac, Carlo; Gao, Weibo; Forneris, Jacopo arXiv https://doi.org/10.48550/arxiv.1906.10992	text	January 2019

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