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Title: Particle and chemical control using tunnel flow

Abstract

An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.

Inventors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1389856
Patent Number(s):
9,759,912
Application Number:
14/034,273
Assignee:
KLA-Tencor Corporation SNL-A
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Sep 23
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R.. Particle and chemical control using tunnel flow. United States: N. p., 2017. Web.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, & Torczynski, John R.. Particle and chemical control using tunnel flow. United States.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R.. Tue . "Particle and chemical control using tunnel flow". United States. doi:. https://www.osti.gov/servlets/purl/1389856.
@article{osti_1389856,
title = {Particle and chemical control using tunnel flow},
author = {Chilese, Frank and Delgado, Gildardo R. and Wack, Daniel and Torczynski, John R.},
abstractNote = {An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 12 00:00:00 EDT 2017},
month = {Tue Sep 12 00:00:00 EDT 2017}
}

Patent:

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