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Title: Particle and chemical control using tunnel flow

Abstract

An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.

Inventors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1389856
Patent Number(s):
9,759,912
Application Number:
14/034,273
Assignee:
KLA-Tencor Corporation SNL-A
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Sep 23
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R.. Particle and chemical control using tunnel flow. United States: N. p., 2017. Web.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, & Torczynski, John R.. Particle and chemical control using tunnel flow. United States.
Chilese, Frank, Delgado, Gildardo R., Wack, Daniel, and Torczynski, John R.. 2017. "Particle and chemical control using tunnel flow". United States. doi:. https://www.osti.gov/servlets/purl/1389856.
@article{osti_1389856,
title = {Particle and chemical control using tunnel flow},
author = {Chilese, Frank and Delgado, Gildardo R. and Wack, Daniel and Torczynski, John R.},
abstractNote = {An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 2017,
month = 9
}

Patent:

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