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Energetics of crystalline silicon dioxide-silicon (SiO2/Si) interfaces

Technical Report ·
DOI:https://doi.org/10.2172/13850· OSTI ID:13850

We consider the interface between a (100) silicon surface and several naturally occurring crystalline silicon dioxide (SiO{sub 2}-silica) polymorphs: {alpha}-quartz, {beta}-cristobalite, tridymite, and keatite. Using a classical empirical potential, we compute the strain energy required for epitaxy for each silica structure. Tridymite is the least energetically favorable epitaxial phase, followed by {alpha}-quartz, then {beta}-cristobalite, while the most energetically favorable phase is keatite. We discuss the implications of this for epitaxial growth, and the crystalline to amorphous transition within atomically thin silica layers.

Research Organization:
Lawrence Livermore National Lab., CA (US)
Sponsoring Organization:
USDOE Office of Energy Research (ER) (US)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
13850
Report Number(s):
UCRL-ID-135122; KC0202020; KC0202020
Country of Publication:
United States
Language:
English

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