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Title: Ozone-Based Atomic Layer Deposition of Crystalline V 2 O 5 Films for High Performance Electrochemical Energy Storage

Journal Article · · Chemistry of Materials
DOI:https://doi.org/10.1021/cm202901z· OSTI ID:1382726
 [1];  [2];  [1];  [1];  [3];  [1]
  1. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States; Institute for Systems Research, University of Maryland, College Park, Maryland 20742, United States
  2. Institute for Systems Research, University of Maryland, College Park, Maryland 20742, United States; MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, University of Maryland, College Park, Maryland 20742, United States
  3. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States; Institute for Systems Research, University of Maryland, College Park, Maryland 20742, United States; MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, University of Maryland, College Park, Maryland 20742, United States

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0001160
OSTI ID:
1382726
Journal Information:
Chemistry of Materials, Vol. 24, Issue 7; Related Information: NEES partners with University of Maryland (lead); University of California, Irvine; University of Florida; Los Alamos National Laboratory; Sandia National Laboratories; Yale University; ISSN 0897-4756
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English