Metrology for electron-beam lithography and resist contrast at the sub-10 nm scale
Journal Article
·
· Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
- Research Organization:
- Energy Frontier Research Centers (EFRC) (United States). Center for Excitonics (CE)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC0001088
- OSTI ID:
- 1381020
- Journal Information:
- Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics, Vol. 28, Issue 6; Related Information: CE partners with Massachusetts Institute of Technology (lead); Brookhaven National Laboratory; Harvard University; ISSN 2166-2746
- Publisher:
- American Vacuum Society/AIP
- Country of Publication:
- United States
- Language:
- English
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