Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching

Li, Kenan; Wojcik, Michael J.; Divan, Ralu; Ocola, Leonidas E.; Shi, Bing; Rosenmann, Daniel; Jacobsen, Chris

doi:10.1116/1.4991794

Title: Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching

Journal Article · Thu Aug 17 00:00:00 EDT 2017 · Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.4991794· OSTI ID:1375484

Li, Kenan; Wojcik, Michael J.; Divan, Ralu; Ocola, Leonidas E.; Shi, Bing; Rosenmann, Daniel; Jacobsen, Chris

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1375484

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Vol. 35 Journal Issue: 6; ISSN 2166-2746

Publisher:: American Vacuum Society/AIPCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 20 works

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References (28)

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