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Title: Epitaxial hexagonal materials on IBAD-textured substrates

Patent ·
OSTI ID:1375205
;

A multilayer structure including a hexagonal epitaxial layer, such as GaN or other group III-nitride (III-N) semiconductors, a <111> oriented textured layer, and a non-single crystal substrate, and methods for making the same. The textured layer has a crystalline alignment preferably formed by the ion-beam assisted deposition (IBAD) texturing process and can be biaxially aligned. The in-plane crystalline texture of the textured layer is sufficiently low to allow growth of high quality hexagonal material, but can still be significantly greater than the required in-plane crystalline texture of the hexagonal material. The IBAD process enables low-cost, large-area, flexible metal foil substrates to be used as potential alternatives to single-crystal sapphire and silicon for manufacture of electronic devices, enabling scaled-up roll-to-roll, sheet-to-sheet, or similar fabrication processes to be used. The user is able to choose a substrate for its mechanical and thermal properties, such as how well its coefficient of thermal expansion matches that of the hexagonal epitaxial layer, while choosing a textured layer that more closely lattice matches that layer.

Research Organization:
iBeam Materials, Inc., Santa Fe, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AR0000447
Assignee:
iBeam Materials, Inc.
Patent Number(s):
9,735,318
Application Number:
15/041,017
OSTI ID:
1375205
Resource Relation:
Patent File Date: 2016 Feb 10
Country of Publication:
United States
Language:
English

References (54)

Process for making ceramic/metal and ceramic/ceramic laminates by oxidation of a metal precursor patent November 1993
Electroplating of superconductor elements patent November 1995
Compact, flexible, LED array patent April 2002
High current density electropolishing in the preparation of highly smooth substrate tapes for coated conductors patent March 2009
Large area nonpolar or semipolar gallium and nitrogen containing substrate and resulting devices patent July 2013
Structure and Method for Fabricating Semiconductor Structures and Devices Utilizing the Formation of a Compliant Substrate and Ion Beam Assisted Deposition for Materials Used to Form the Same patent-application January 2003
Superconductor incorporating therein superconductivity epitaxial thin film and manufacturing method thereof patent-application November 2003
Flexible LED lighting strip patent-application February 2004
Conductive layer for biaxially oriented semiconductor film growth patent-application February 2006
Surface improvement method in fabricating high temperature superconductor devices patent-application August 2006
Chemical solution deposition method of fabricating highly aligned MgO templates patent-application December 2006
[100] Or [110] aligned, semiconductor-based, large-area, flexible, electronic devices patent-application September 2008
Semiconductor-based, large-area, flexible, electronic devices on <100> oriented substrates patent-application October 2008
Universal Nucleation Layer/Diffusion Barrier for Ion Beam Assisted Deposition patent-application April 2009
Bonded Intermediate Substrate and Method of Making Same patent-application November 2009
Dual Chamber System Providing Simultaneous Etch and Deposition on Opposing Substrate Sides for Growing Low Defect Density Epitaxial Layers patent-application January 2010
Flexible Perimeter Lighting Apparatus patent-application February 2010
Flexible Light Strip patent-application March 2010
Flexible Thin-Type Light-Emitting-Diode Circuit Substrate and a Light-Emitting-Diode Lamp Strip patent-application April 2010
Thick Superconductor Films with Improved Performance patent-application May 2010
Light-emitting strip structure with light guiding effect patent-application June 2010
Freely plastically flexible light-emitting strip structure patent-application September 2010
GaN Nanorod Arrays Formed by Ion Beam Implantation patent-application October 2010
Process for Fabricating III-Nitride Based Nanopyramid LEDs Directly on a Metalized Silicon Substrate patent-application April 2011
Phase-Separated, Epitaxial Composite Cap Layers for Electronic Device Applications and Method of Making the Same patent-application June 2011
Method for Producing a Flexible Light Strip patent-application September 2011
Solution Deposition Planarization Method patent-application February 2012
Thermal Expansion Engineering for Polycrystalline Aluminum Nitride Sintered Bodies patent-application June 2012
Light Emitting Device and a Manufacturing Method Thereof patent-application November 2012
Depositing Calcium Fluoride Template Layers for Solar Cells patent-application November 2012
Flexible LED Light Strip for a Bicycle and Method for Making the Same patent-application January 2013
Methods of Fabricating Optoelectronic Devices Using Layers Detached from Semiconductor Donors and Devices Made Thereby patent-application June 2013
Extended Length Flexible LED Light Strip System patent-application November 2014
Cuttable Flexible Light Engines patent-application April 2015
Techniques for Forming Angled Structures for Reduced Defects in Heteroepitaxy of Semiconductor Films patent-application October 2015
Laminar Structure of Semiconductor and Manufacturing Method Thereof patent-application December 2015
Polycrystalline nitride semiconductor light-emitting diodes fabricated on quartz substrates journal April 2000
Materials science challenges for high-temperature superconducting wire journal September 2007
Control of the crystalline quality of wurtzitic GaN films deposited on γ-LiAlO2 by ion-beam assisted molecular-beam epitaxy
  • Gerlach, J. W.; Hofmann, A.; Höche, T.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 257, Issue 1-2, p. 315-319 https://doi.org/10.1016/j.nimb.2007.01.025
journal April 2007
Leveling effect of sol–gel SiO2 coatings onto metallic foil substrates journal April 2001
Stacks of YBCO Films Using Multiple IBAD Templates journal June 2007
The Surface Morphology of Ba0.65Sr0.35TiO3 Thin Film by Sol-Gel Method journal September 2005
Epitaxial growth of gallium nitride by ion-beam-assisted evaporation journal December 1995
Development of textured MgO templates on nonmetallic flexible ceraflex journal September 2006
Optimization of ion-atomic beam source for deposition of GaN ultrathin films journal August 2014
Ion beam induced crystalline texturing during thin film deposition journal February 2015
Very fast biaxial texture evolution using high rate ion-beam-assisted deposition of MgO journal January 2009
Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes journal March 1994
Solution deposition planarization of long-length flexible substrates journal February 2011
Artificial Grain Alignment of Organic Crystalline Thin Films journal January 2008
Fundamentals of topographic substrate leveling journal June 1988
Planarization of Substrate Topography by Spin Coating journal January 1987
Ion Beam Assisted Texture Evolution during Thin Film Deposition of Metal Nitrides journal January 2000
Deposition of in-plane textured MgO on amorphous Si3N4 substrates by ion-beam-assisted deposition and comparisons with ion-beam-assisted deposited yttria-stabilized-zirconia journal November 1997

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