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Title: Fabrication and efficiency measurement of a Mo/C/Si/C three material system multilayer Laue lens

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4978610· OSTI ID:1372402

In this letter we report on the manufacturing of a multilayer Laue lens (MLL) consisting of a multilayer stack with three materials: molybdenum and silicon as absorber and spacer layer, respectively, and carbon as transition layers. The design has four layers per period: Mo/C/Si/C. It yields 6000 zones, and provides an aperture of 50 μm. This allows the MLL structure to accept a large portion of the coherent part of the beam and achieving a small spot size. The MLL deposition was made by magnetron sputtering at the Fraunhofer IWS, the sectioning was done by laser cutting and subsequent focused ion beam milling to a thickness that provides a good efficiency for a photon energy of 12 keV. The diffraction efficiency as a function of the tilting angle has been measured at beamline 1-BM of the Advanced Photon Source. An efficiency of almost 40% has been achieved. This shows that the material system performs well compared to MLLs made of two-materials and that it is in an excellent agreement with the numerically calculated efficiency for a comparable molybdenum/silicon bilayer system lens. Here, we conclude that the three material system offers high efficiencies and is advantageous for stress reduction in MLLs.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1372402
Alternate ID(s):
OSTI ID: 1348039
Journal Information:
Applied Physics Letters, Vol. 110, Issue 11; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 6 works
Citation information provided by
Web of Science

References (19)

Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens journal January 2015
Efficiency of a multilayer-Laue-lens with a 102 μm aperture journal August 2015
Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens journal June 2008
Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device journal October 2008
Calculated efficiencies of three-material low stress coatings for diffractive x-ray transmission optics
  • Kubec, Adam; Braun, Stefan; Gawlitza, Peter
  • PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION – SRI2015, AIP Conference Proceedings https://doi.org/10.1063/1.4952882
conference January 2016
Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors journal June 2002
Advanced multilayer Laue lens fabrication at NSLS-II conference October 2012
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses journal January 2011
Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture journal September 2007
Coupled wave description of the diffraction by zone plates with high aspect ratios journal May 1992
Hard x-ray nanofocusing by multilayer Laue lenses journal June 2014
Point focusing with flat and wedged crossed multilayer Laue lenses journal February 2017
Focusing hard x rays to nanometer dimensions using Fresnel zone plates journal July 2006
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal July 1993
Diffraction properties of multilayer Laue lenses with an aperture of 102 µm and WSi_2/Al bilayers journal January 2015
Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens journal March 2006
Multilayer growth in the APS rotary deposition system conference September 2007
Ultra-high resolution zone-doubled 
diffractive X-ray optics for the multi-keV regime journal December 2010
Ptychography with multilayer Laue lenses journal August 2014

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