A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Klug, Jeffrey A.; Weimer, Matthew S.; Emery, Jonathan D.; Yanguas-Gil, Angel; Seifert, Sönke; Schlepütz, Christian M.; Martinson, Alex B.  F.; Elam, Jeffrey W.; Hock, Adam S.; Proslier, Thomas

doi:10.1063/1.4934807

Title: A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Journal Article · Mon Nov 02 00:00:00 EST 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4934807· OSTI ID:1370820

Klug, Jeffrey A. ^[1]; Weimer, Matthew S. ^[2]; Emery, Jonathan D. ^[1];

^[3]; Seifert, Sönke ^[4];

^[4]; Martinson, Alex B. F. ^[1]; Elam, Jeffrey W. ^[3]; Hock, Adam S. ^[5]; Proslier, Thomas ^[1]

Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry
Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
Argonne National Lab. (ANL), Argonne, IL (United States). X-Ray Science Division
Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry; Argonne National Lab. (ANL), Argonne, IL (United States). Chemical Science and Engineering Division

Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. In this work, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. We present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er₂O₃ ALD on amorphous ALD alumina and single crystalline sapphire.

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Research Organization:: Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001059; AC02-06CH11357

OSTI ID:: 1370820

Alternate ID(s):: OSTI ID: 1224877

Journal Information:: Review of Scientific Instruments, Vol. 86, Issue 11; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 13 works

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Title: A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

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