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Method for fabrication of ceramic dielectric films on copper foils

Patent ·
OSTI ID:1363751
; ; ;
The present invention provides copper substrate coated with a lead-lanthanum-zirconium-titanium (PLZT) ceramic film, which is prepared by a method comprising applying a layer of a sol-gel composition onto a copper foil. The sol-gel composition comprises a precursor of a ceramic material suspended in 2-methoxyethanol. The layer of sol-gel is then dried at a temperature up to about 250.degree. C. The dried layer is then pyrolyzed at a temperature in the range of about 300 to about 450.degree. C. to form a ceramic film from the ceramic precursor. The ceramic film is then crystallized at a temperature in the range of about 600 to about 750.degree. C. The drying, pyrolyzing and crystallizing are performed under a flowing stream of an inert gas.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UCHICAGO ARGONNE, LLC
Patent Number(s):
9,679,705
Application Number:
14/631,536
OSTI ID:
1363751
Country of Publication:
United States
Language:
English

References (11)

Effect of local oxygen activity on Ni–BaTiO3 interfacial reactions journal August 2006
Chemical solution deposition of ferroelectric lead lanthanum zirconate titanate films on base-metal foils journal January 2008
Ferroelectric response from lead zirconate titanate thin films prepared directly on low-resistivity copper substrates journal April 2005
Imprint and oxygen deficiency in (Pb,La)(Zr,Ti)O 3 thin‐film capacitors with La‐Sr‐Co‐O electrodes journal March 1995
Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications journal February 2005
PZT and PLZT thin films on Cu substrates for dielectric and piezoelectric applications: Effect of processing atmosphere and film strain journal January 2005
Importance Of Solution Chemistry In Preparing Sol–Gel PZT Thin Films Directly On Copper Surfaces journal January 2008
Ferroelectric behavior in nominally relaxor lead lanthanum zirconate titanate thin films prepared by chemical solution deposition on copper foil journal June 2006
Chemical solution deposition of electronic oxide films journal May 2004
Sol-gel processing of PZT thin films: A review of the state-of-the-art and process optimization strategies journal February 1995
Solution chemistry effects in Pb(Zr, Ti)O3 thin film processing journal November 1992

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Related Subjects

36 MATERIALS SCIENCE