On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip

Mi, Hongyi; Yuan, Hao-Chih; Seo, Jung-Hun; Auciello, Orlando H.; Mancini, Derrick C.; Carpick, Robert W.; Pacheco, Sergio P.; Sumant, Anirudha V.; Ma, Zhenqiang

doi:10.1063/1.4979480

On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip

Journal Article · Mon Mar 27 00:00:00 EDT 2017 · AIP Advances

DOI:https://doi.org/10.1063/1.4979480· OSTI ID:1361805

Mi, Hongyi ^[1]; Yuan, Hao-Chih ^[1]; ^[1]; Auciello, Orlando H. ^[2]; ^[3]; Carpick, Robert W. ^[4]; Pacheco, Sergio P. ^[5]; Sumant, Anirudha V. ^[3]; Ma, Zhenqiang ^[1]

Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA, Now with Department of Materials Science and Engineering, University of Texas-Dallas, Richardson, Texas 75080, USA
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA
Department Engineering Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA
Packaging Solutions Development, Freescale Semiconductor, Inc., 1300 N Alma School Rd, Chandler, Arizona 85224, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1361805

Alternate ID(s):: OSTI ID: 1421014
OSTI ID: 1360136

Journal Information:: AIP Advances, Journal Name: AIP Advances Journal Issue: 3 Vol. 7; ISSN AAIDBI; ISSN 2158-3226

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

References (17)

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Ultrananocrystalline diamond film as an optimal cell interface for biomedical applications Bajaj, Piyush; Akin, Demir; Gupta, Amit Biomedical Microdevices, Vol. 9, Issue 6 https://doi.org/10.1007/s10544-007-9090-2	journal	May 2007
Enhanced nucleation, smoothness and conformality of ultrananocrystalline diamond (UNCD) ultrathin films via tungsten interlayers Naguib, Nevin N.; Elam, Jeffrey W.; Birrell, James Chemical Physics Letters, Vol. 430, Issue 4-6, p. 345-350 https://doi.org/10.1016/j.cplett.2006.08.137	journal	October 2006
Fundamentals of ultrananocrystalline diamond (UNCD) thin films as biomaterials for developmental biology: Embryonic fibroblasts growth on the surface of (UNCD) films Shi, Bing; Jin, Qiaoling; Chen, Liaohai Diamond and Related Materials, Vol. 18, Issue 2-3 https://doi.org/10.1016/j.diamond.2008.09.016	journal	February 2009
Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices Auciello, Orlando; Sumant, Anirudha V. Diamond and Related Materials, Vol. 19, Issue 7-9 https://doi.org/10.1016/j.diamond.2010.03.015	journal	July 2010
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices Krauss, A. R.; Auciello, O.; Gruen, D. M. Diamond and Related Materials, Vol. 10, Issue 11 https://doi.org/10.1016/s0925-9635(01)00385-5	journal	November 2001
An introduction to mechanical-properties-related issues in MEMS structures Allameh, S. M. Journal of Materials Science, Vol. 38, Issue 20, p. 4115-4123 https://doi.org/10.1023/a:1026369320215	journal	January 2003
Systematic studies of the nucleation and growth of ultrananocrystalline diamond films on silicon substrates coated with a tungsten layer Chu, Yueh-Chieh; Tu, Chia-Hao; Jiang, Gerald Journal of Applied Physics, Vol. 111, Issue 12 https://doi.org/10.1063/1.4729798	journal	June 2012
Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films Auciello, Orlando; Birrell, James; Carlisle, John A. Journal of Physics: Condensed Matter, Vol. 16, Issue 16 https://doi.org/10.1088/0953-8984/16/16/r02	journal	April 2004
Surface chemistry and bonding configuration of ultrananocrystalline diamond surfaces and their effects on nanotribological properties Sumant, A. V.; Grierson, D. S.; Gerbi, J. E. Physical Review B, Vol. 76, Issue 23 https://doi.org/10.1103/physrevb.76.235429	journal	December 2007
Hot-electron degradation of n-channel polysilicon MOSFETs Banerjee, S.; Sundaresan, R.; Shichijo, H. IEEE Transactions on Electron Devices, Vol. 35, Issue 2 https://doi.org/10.1109/16.2434	journal	February 1988
Effect of final annealing on hot-electron-induced MOSFET degradation Hsu, F. -C.; Hui, J.; Chiu, K. Y. IEEE Electron Device Letters, Vol. 6, Issue 7 https://doi.org/10.1109/edl.1985.26157	journal	July 1985
Are Diamonds a MEMS' Best Friend? Auciello, Orlando; Pacheco, Sergio; Sumant, Anirudha IEEE Microwave Magazine, Vol. 8, Issue 6, p. 61-75 https://doi.org/10.1109/mmm.2007.907816	journal	December 2007
Thermal Budget Limits of Quarter-Micrometer Foundry CMOS for Post-Processing MEMS Devices Takeuchi, H.; Wung, A.; Sun, X. IEEE Transactions on Electron Devices, Vol. 52, Issue 9 https://doi.org/10.1109/ted.2005.854287	journal	September 2005
Large-area low-temperature ultrananocrystalline diamond (UNCD) films and integration with CMOS devices for monolithically integrated diamond MEMS/NEMS-CMOS systems Sumant, A. V.; Auciello, O.; Yuan, H. -C. SPIE Defense, Security, and Sensing, SPIE Proceedings https://doi.org/10.1117/12.822794	conference	May 2009
Microscale Characterization of Mechanical Properties Hemker, K. J.; Sharpe, W. N. Annual Review of Materials Research, Vol. 37, Issue 1 https://doi.org/10.1146/annurev.matsci.36.062705.134551	journal	August 2007
Effect of thermal annealing and cooling conditions of P-doped n-Si crystals on the temperature dependences of the charge carrier mobility in the impurity scattering region Gaidar, G. P. Surface Engineering and Applied Electrochemistry, Vol. 49, Issue 6 https://doi.org/10.3103/s1068375513060070	journal	November 2013

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