Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.

Groll, Nickolas; Klug, Jeffrey A.; Cao, Chaoyue; Altin, Serdar; Claus, Helmut; Becker, Nicholas G.; Zasadzinski, John; Pellin, Mike; Proslier, Thomas

doi:10.1063/1.4867880

Title: Tunneling Spectroscopy of Superconducting MoN and NbTiN Grown by Atomic Layer Deposition.

Journal Article · Mon Mar 03 00:00:00 EST 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4867880· OSTI ID:1357490

Groll, Nickolas ^[1]; Klug, Jeffrey A. ^[1]; Cao, Chaoyue ^[2]; Altin, Serdar ^[3]; Claus, Helmut ^[1]; Becker, Nicholas G. ^[2]; Zasadzinski, John ^[2]; Pellin, Mike ^[1]; Proslier, Thomas ^[1]

Argonne National Lab. (ANL), Argonne, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Illinois Inst. of Technology, Chicago, IL (United States)
Inonu Univ., Malatya (Turkey)

A tunneling spectroscopy study is presented of superconducting MoN and Nbo.8Tio.2N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2meV and 2.4meV, respectively, with a corresponding critical temperature of 11.5K and 13.4 K, among the highest reported Tc values achieved by the ALD technique.Tunnel junctions were obtained using a mechanical contact method with a Au tip. While the native oxides of these films provided poor tunnel barriers, high quality tunnel junctions with low zero bias conductance (below rvl0%) were obtained using an artificial tunnel barrier of Ah03 on the film's surface grown ex situ by ALD. We find a large critical current density on the order of 4 x 106Ncm2 at T =0.8Tc for a 60 run MoN film and demonstrate conformal coating capabilities of ALD onto high aspect ratio geometries. These results suggest that the ALD technique offers significant promise for thin film superconducting device applications.

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Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1357490

Journal Information:: Applied Physics Letters, Vol. 104, Issue 9; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 10 works

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